Effect of Coating Viscoelasticity on Quality Factor and Limit of Detection of Microcantilever Chemical Sensors

IEEE Sensors Journal

Volumn 7, Issue 2, 2007, Pages 230-236

  Josse, Fabien ^b   Lochon, Frederic ^a   Rebiere, Dominique ^a  

^a UNIVERSITÉ BORDEAUX 1   (France)

^b Marquette University   (United States)

Author keywords

Beam vibrations; chemical sensors; fluid losses; limit of detection (LOD); microcantilevers; polymer coatings; quality factor; resonant frequency; sensitivity; viscoelastic losses

Indexed keywords

EID: 85008006714     PISSN: 1530437X     EISSN: 15581748     Source Type: Journal    
DOI: 10.1109/JSEN.2006.888600     Document Type: Article

References (25)

1. F. Lochon, I. Dufour, and D. Rebiere, “An alternative solution to improve sensitivity of resonant microcantilever chemical sensors: Comparison between using high-order modes and reducing dimensions,” Sens. Actuators B, vol. 108, no. 1–2, pp. 979–985, 2005.
2. D. Lange, C. Hagleitner, A. Hierlemann, O. Brand, and H. Baltes, “Complementary metal oxide semiconductor cantilever arrays on a single chip: Mass-sensitive detection of volatile organic compounds,” Anal. Chem., vol. 74, pp. 3084–3095, 2002.
3. N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos, “Cantilever transducers as a platform for chemical and biological sensors,” Rev. Sci. Instrum., vol. 75, pp. 2229–2253, 2004.
4. M. Sepaniak, P. Datskos, N. Lavrik, and C. Tipple, “Microcantilever transducers: A new approach in sensor technology,” Anal. Chem. A, vol. 74, no. 21, pp. 568A-575A, 2002.
5. O. Brand and H. Baltes, “Micromachined resonant sensors and overview,” Sens. Update, vol. 4, pp. 3–51, 1998.
6. M. Maute, S. Raibe, F. E. Prins, D. P. Kern, H. Ulmer, U. Weimar, and W. Gopel, “Detection of volatile organic compounds (VOCs) with polymer-coated cantilevers,” Sens. Actuators B, vol. 58, pp. 505–511, 1999.
7. C. Vancura, M. Ruegg, Y. Li, C. Hagleitner, and A. Hierlemann, “Magnetiaclly actuated complementary metal oxide semiconductor resonant cantilever gas sensor systems,” Anal. Chem., vol. 77, no. 9, pp. 2690–2699, 2005.
8. T. Thundat, G. Y. Chen, R. J. Warmack, D. P. Allison, and E. A. Wachter, “Vapor detection using resonating microcantilevers,” Anal. Chem., vol. 67, pp. 519–521, 1995.
9. J. D. Adams, G. Parrott, C. Bauer, T. Sant, L. Manning, M. Jones, B. Rogers, D. McCorkle, and T. L. Ferrell, “Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array,” Appl. Phys. Lett., vol. 83, no. 16, pp. 3428–3430, 2003.
10. K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenny, B. C. Stipe, and D. Rugar, “Quality factors in micron- and submicron-thick cantilevers,” J. Microelectromech. Syst., vol. 9, pp. 117–125, 2000.
11. R. Lifshitz and M. L. Roukes, “Thermoelastic damping in micro- and nanomechanical systems,” Phys. Rev. B, vol. 61, pp. 5600–5609, 2000.
12. J. E. Sader, “Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope,” J. Appl. Phys., vol. 84, pp. 64–76, 1998.
13. W. K. Blake, “The radiation from free-free beams in air and in water,” J. Sound Vibration, vol. 33, pp. 427–450, 1974.
14. Z. Hao, A. Erbil, and F. Ayazi, “An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations,” Sens. Actuators A, vol. 109, pp. 156–164, 2003.
15. U. Sampath, “Analytical modeling of polymer-coated microcantilever-based dynamic microsensors,” Master's thesis, Dept. Elect. Comput. Eng., Marquette Univ., Milwaukee, WI, 2005.
16. D. I. G. Jones, Handbook of Viscoelastic Vibration Damping. New York: Wiley, 2001.
17. P. Lu, F. Shen, S. J. O'shea, K. H. Lee, and T. Y. Ng, “Analysis of surface effects on mechanical properties of microcantilevers,” Mater. Phys. Mech., vol. 4, pp. 51–55, 2001.
18. F. Lochon, I. Dufour, and D. Rebiere, “A microcantilever chemical sensors optimization by taking into account losses,” Sens. Actuators B, vol. 118, pp. 292–296, 2006.
19. J. D. Ferry, Viscoelastic Properties of Polymers. New York: Wiley, 1961.
20. J. E. Mark, Ed., Polymer Data Handbook. Oxford, U.K.: Oxford Univ. Press, 1999.
21. F. Lochon, I. Dufour, D. Rebiere, U. Sampath, S. M. Heinrich, and F. Josse, “Effect of viscoelasticity on quality factor of microcantilever chemical sensors: optimal coating thickness for minimum limit of detection,” in Proc. IEEE Sensors, Irvine, CA, 2005, pp. 265–268.
22. L. Fadel, F. Lochon, I. Dufour, and O. Français, “Chemical sensing: Millimeter size resonant microcantilever performance,” J. Micromech. Microeng., vol. 14, pp. S23-S30, 2004.
23. T. R. Albrecht, P. Grutter, D. Horne, and D. Rugar, “Frequency modulation detection using high-Q cantilevers for enhanced fore microscope sensitivity,” J. Appl. Phys., vol. 69, pp. 668–673, 1991.
24. W. P. Robins, “Phase noise in digital sources,” in IEE Telecommunications, ser. 9. London, U.K.: Peregrinus, 1982.
25. L. Fadel, I. Dufour, F. Lochon, and O. Français, “Signal-to-noise ratio of resonant microcantilever type chemical sensors as a function of resonant frequency and quality factor,” Sens. Actuators B, vol. 102, pp. 73–77, 2004.