Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness

Materials Science and Engineering C

Volumn 26, Issue 2-3, 2006, Pages 348-353

  Lochon, Frédéric ^a   Fadel, Ludivine ^a   Dufour, Isabelle ^a   Rebière, Dominique ^a   Pistré, Jacques ^a  

^a UNIVERSITÉ BORDEAUX 1   (France)

Author keywords

Microcantilever sensor; Resonant frequency; Sensitive layer thickness

Indexed keywords

ACOUSTIC NOISE; CHEMICAL SENSORS; COATING TECHNIQUES; ETHANOL; NATURAL FREQUENCIES;

MICROCANTILEVER SENSORS; POLYMER SENSITIVE COATING; SENSITIVE LAYER THICKNESS;

SILICON;

EID: 32844455386     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2005.10.079     Document Type: Conference Paper

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