Magnetically actuated CMOS resonant cantilever gas sensor for volatile organic compounds

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1355-1358

  Vancura C ^a   Ruegg M ^a   Li, Y ^a   Lange, D ^b   Hagleitner, C ^a   Brand, O ^c   Hierlemann, A ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

^b Stanford University   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

CMOS process; Feedback circuits; Frequency; Gas detectors; Magnetic resonance; Metals industry; Micromachining; Piezoresistance; Textile industry; Volatile organic compounds

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; GAS CHROMATOGRAPHY; GAS DETECTORS; MAGNETIC RESONANCE; METALS; MICROMACHINING; MICROSYSTEMS; MOS DEVICES; NANOCANTILEVERS; ORGANIC COMPOUNDS; TEXTILE INDUSTRY; TRANSDUCERS; VOLATILE ORGANIC COMPOUNDS;

CMOS PROCESSS; FEEDBACK CIRCUITS; FREQUENCY; METALS INDUSTRIES; PIEZORESISTANCE;

SOLID-STATE SENSORS;

EID: 84944725537     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217025     Document Type: Conference Paper

References (9)

1. D. Lange, C. Hagleitner, C. Herzog, O. Brand, and H. Baltes "Electromagnetic Actuation and MOS-transistor Sensing for CMOS-integrated Micromechanical Resonators", Sensors and Actuators A 103, 2003, 150-155.
2. D. Lange, C. Hagleitner, A. Hierlemann, O. Brand, and H. Baltes "Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip: Mass-Sensitive Detection of Volatile Organic Compounds", Anal. Chem. 74, 2002, 3084-3095.
3. T.R. Albrecht, P. Grütter, D. Horne, and D. Rugar "Frequency Modulation Detection Using High-Q Cantilevers for Enhanced Force Microscope Sensitivity", J. Appl. Phys. 69, 1991, 668-673.
4. F.M. Battiston, J.-P. Ramseyer, H.P. Lang, M.K. Baller, C. Gerber, J.K. Gimzewski, E. Meyer, H.-J. Güntherodt "A Chemical Sensor Based on a Microfabricated Cantilever Array with Simultaneous Resonance-Frequency and Bending Readout", Sensors and Actuators B 77, 2001, 122-131.
5. nd edition, compiled by A.D. McNaught and A. Wilkinson Royal Society of Chemistry, Cambridge UK.
6. H. Baltes and O. Brand "CMOS-based Microsensors and Packaging", Sensors and Actuators A 92, 2001, 1-9.
7. C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand, and H. Baltes "Smart Single Chip Gas Sensor System", Nature 414, 2001, 293-296.
8. J. Riddick, A. Bunger Organic Solvents, "Techniques of Chemistry"; A. Weissberger, Wiley Interscience New York 1986.
9. A. Hierlemann, A. Ricco, K. Bodenhöfer, A. Dominik, and W. Göpel "Conferring Selectivity to Chemical Sensors via Polymer Side-Chain Selection: Thermodynamics of Vapor Sorption by a Set of Polysiloxanes Thickness-Shear Mode Resonators" Anal. Chem. 72, 2000, 3696-3708.