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Applied Physics Letters

Volumn 96, Issue 26, 2010, Pages

Nanoscale space charge generation in local oxidation nanolithography

(2) Chiesa, Marco a Garcia, Ricardo a

a INSTITUTO DE MICROELECTRÓNICA DE MADRID (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ATMOSPHERES; HUMID AIR; INTRINSIC FEATURES; LOCAL OXIDATION; MOLECULAR ARCHITECTURE; NANO SCALE; OXIDATION TIME; SCREENING EFFECT; SPACE CHARGE DENSITY; SPACE CHARGE GENERATION; SPACE CHARGES; WATER MOLECULE;

ATOMIC FORCE MICROSCOPY; ELECTRIC SPACE CHARGE; SURFACE POTENTIAL; SURFACE PROPERTIES;

OXIDATION;

EID: 77954345072 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3459976 Document Type: Article

Times cited : (13)

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