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Physical Review B - Condensed Matter and Materials Physics

Volumn 80, Issue 24, 2009, Pages

Fabrication of ZnO thin film transistors by atomic force microscopy nanolithogrophy through zinc thin films

(3) Tsai, Jeff T H a Lee, Ben H B a Yang, Ming S a

a TATUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77954318338 PISSN: 10980121 EISSN: 1550235X Source Type: Journal
DOI: 10.1103/PhysRevB.80.245215 Document Type: Article

Times cited : (7)

References (26)

1
- 84892017473
- Springer, New York, 10.1007/978-90-481-2255-4
- D. J. R. Cristaldi, S. Pennisi, and F. Pulvirenti, Liquid Crystal Display Drivers: Techniques and Circuits (Springer, New York, 2009). 10.1007/978-90-481-2255-4
- (2009) Liquid Crystal Display Drivers: Techniques and Circuits
- Cristaldi, D.J.R.¹ Pennisi, S.² Pulvirenti, F.³

2
- 0001280586
- 10.1063/1.94080
- E. Kinsbron, M. Sternheim, and R. Knoell, Appl. Phys. Lett. 42, 835 (1983). 10.1063/1.94080
- (1983) Appl. Phys. Lett. , vol.42 , pp. 835
- Kinsbron, E.¹ Sternheim, M.² Knoell, R.³

3
- 0032185906
- 10.1063/1.368581
- S. K. Kim, Y. J. Choi, K. S. Cho, and J. Jang, J. Appl. Phys. 84, 4006 (1998). 10.1063/1.368581
- (1998) J. Appl. Phys. , vol.84 , pp. 4006
- Kim, S.K.¹ Choi, Y.J.² Cho, K.S.³ Jang, J.⁴

4
- 0035851452
- 10.1063/1.1418254
- H. Gleskova and S. Wagner, Appl. Phys. Lett. 79, 3347 (2001). 10.1063/1.1418254
- (2001) Appl. Phys. Lett. , vol.79 , pp. 3347
- Gleskova, H.¹ Wagner, S.²

5
- 4244109288
- 10.1103/PhysRevLett.46.371
- J. M. Hvam and M. H. Brodsky, Phys. Rev. Lett. 46, 371 (1981). 10.1103/PhysRevLett.46.371
- (1981) Phys. Rev. Lett. , vol.46 , pp. 371
- Hvam, J.M.¹ Brodsky, M.H.²

6
- 30244518297
- 10.1103/PhysRevLett.52.2360
- M. O. Thompson, G. J. Galvin, J. W. Mayer, P. S. Peercy, J. M. Poate, D. C. Jacobson, A. G. Cullis, and N. G. Chew, Phys. Rev. Lett. 52, 2360 (1984). 10.1103/PhysRevLett.52.2360
- (1984) Phys. Rev. Lett. , vol.52 , pp. 2360
- Thompson, M.O.¹ Galvin, G.J.² Mayer, J.W.³ Peercy, P.S.⁴ Poate, J.M.⁵ Jacobson, D.C.⁶ Cullis, A.G.⁷ Chew, N.G.⁸

7
- 0001142560
- 10.1063/1.371560
- M. Miyasaka and J. Stoemenos, J. Appl. Phys. 86, 5556 (1999). 10.1063/1.371560
- (1999) J. Appl. Phys. , vol.86 , pp. 5556
- Miyasaka, M.¹ Stoemenos, J.²

8
- 0024908311
- High-performance TFT's fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film
- DOI 10.1109/16.40970
- K. Sera, F. Okumura, H. Uchida, S. Itoh, S. Kaneko, and K. Hotta, IEEE Trans. Electron Devices 36, 2868 (1989). 10.1109/16.40970 (Pubitemid 20653429)
- (1989) IEEE Transactions on Electron Devices , vol.36 , Issue.12 , pp. 2868-2872
- Sera Kenji¹ Okumura Fujio² Uchida Hiroyuki³ Itoh Shinji⁴ Kaneko Setsuo⁵ Hotta Kozuaki⁶

9
- 36549103626
- 10.1063/1.342851
- R. Kakkad, J. Smith, W. S. Lau, S. J. Fonash, and R. Kerns, J. Appl. Phys. 65, 2069 (1989). 10.1063/1.342851
- (1989) J. Appl. Phys. , vol.65 , pp. 2069
- Kakkad, R.¹ Smith, J.² Lau, W.S.³ Fonash, S.J.⁴ Kerns, R.⁵

10
- 34147158811
- 10.1063/1.101814
- Gang Liu and S. J. Fonash, Appl. Phys. Lett. 55, 660 (1989). 10.1063/1.101814
- (1989) Appl. Phys. Lett. , vol.55 , pp. 660
- Liu, G.¹ Fonash, S.J.²

11
- 0348170967
- 10.1063/1.1627455
- M. A. T. Izmajlowicz, A. J. Flewitt, W. I. Milne, and N. A. Morrison, J. Appl. Phys. 94, 7535 (2003). 10.1063/1.1627455
- (2003) J. Appl. Phys. , vol.94 , pp. 7535
- Izmajlowicz, M.A.T.¹ Flewitt, A.J.² Milne, W.I.³ Morrison, N.A.⁴

12
- 33847396256
- Germanium enhanced large-grain growth by pulse mode rapid thermal crystallization process
- DOI 10.1007/s10854-006-9066-7
- C.-W. Lin, P.-A. Chang, and Y.-S. Lee, J. Mater. Sci.: Mater. Electron. 18, 475 (2007). 10.1007/s10854-006-9066-7 (Pubitemid 46336199)
- (2007) Journal of Materials Science: Materials in Electronics , vol.18 , Issue.5 , pp. 475-480
- Lin, C.-W.¹ Chang, P.-A.² Lee, Y.-S.³

13
- 9744248669
- Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
- DOI 10.1038/nature03090
- K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature (London) 432, 488 (2004). 10.1038/nature03090 (Pubitemid 39585210)
- (2004) Nature , vol.432 , Issue.7016 , pp. 488-492
- Nomura, K.¹ Ohta, H.² Takagi, A.³ Kamiya, T.⁴ Hirano, M.⁵ Hosono, H.⁶

14
- 0001106216
- 10.1063/1.367375
- V. Srikant and D. R. Clarke, J. Appl. Phys. 83, 5447 (1998). 10.1063/1.367375
- (1998) J. Appl. Phys. , vol.83 , pp. 5447
- Srikant, V.¹ Clarke, D.R.²

15
- 0347477236
- 10.1103/PhysRevLett.91.205502
- F. Tuomisto, V. Ranki, K. Saarinen, and D. C. Look, Phys. Rev. Lett. 91, 205502 (2003). 10.1103/PhysRevLett.91.205502
- (2003) Phys. Rev. Lett. , vol.91 , pp. 205502
- Tuomisto, F.¹ Ranki, V.² Saarinen, K.³ Look, D.C.⁴

16
- 21044446420
- P -ZnO/ n -GaN heterostructure ZnO light-emitting diodes
- DOI 10.1063/1.1940736, 222101
- D.-K. Hwang, S.-H. Kang, J.-H. Lim, E.-J. Yang, J.-Y. Oh, J.-H. Yang, and S.-J. Park, Appl. Phys. Lett. 86, 222101 (2005). 10.1063/1.1940736 (Pubitemid 40865962)
- (2005) Applied Physics Letters , vol.86 , Issue.22 , pp. 1-3
- Hwang, D.-K.¹ Kang, S.-H.² Lim, J.-H.³ Yang, E.-J.⁴ Oh, J.-Y.⁵ Yang, J.-H.⁶ Park, S.-J.⁷

17
- 33645411896
- Nano-chemistry and scanning probe nanolithographies
- DOI 10.1039/b501599p
- R. Garcia, R. V. Martínez, and J. Martinez, Chem. Soc. Rev. 35, 29 (2006). 10.1039/b501599p (Pubitemid 43485011)
- (2006) Chemical Society Reviews , vol.35 , Issue.1 , pp. 29-38
- Garcia, R.¹ Martinez, R.V.² Martinez, J.³

18
- 58149311455
- 10.1021/nl801599k
- J. Martinez, R. V. Martínez, and R. Garcia, Nano Lett. 8, 3636 (2008). 10.1021/nl801599k
- (2008) Nano Lett. , vol.8 , pp. 3636
- Martinez, J.¹ Martínez, R.V.² Garcia, R.³

19
- 0036492929
- Electronic transport properties of single-crystal silicon nanowires fabricated using an atomic force microscope
- DOI 10.1016/S1386-9477(02)00288-6, PII S1386947702002886
- N. Clément, D. Tonneau, H. Dallaporta, V. Bouchiat, D. Fraboulet, D. Mariole, J. Gautier, and V. Safarov, Physica E (Amsterdam) 13, 999 (2002). 10.1016/S1386-9477(02)00288-6 (Pubitemid 34648867)
- (2002) Physica E: Low-Dimensional Systems and Nanostructures , vol.13 , Issue.2-4 , pp. 999-1002
- Clement, N.¹ Tonneau, D.² Dallaporta, H.³ Bouchiat, V.⁴ Fraboulet, D.⁵ Mariole, D.⁶ Gautier, J.⁷ Safarov, V.⁸

20
- 33846160143
- 4 nanochannels fabricated by AFM local-oxidation nanolithography using Mo/poly(methyl methacrylate) nanomasks
- DOI 10.1002/adma.200600997
- L. Pellegrino, Y. Yanagisawa, M. Ishikawa, T. Matsumoto, H. Tanaka, and T. Kawai, Adv. Mater. (Weinheim, Ger.) 18, 3099 (2006). 10.1002/adma.200600997 (Pubitemid 46080200)
- (2006) Advanced Materials , vol.18 , Issue.23 , pp. 3099-3104
- Pellegrino, L.¹ Yanagisawa, Y.² Ishikawa, M.³ Matsumoto, T.⁴ Tanaka, H.⁵ Kawai, T.⁶

21
- 0004005306
- John Wiley & Sons, New York
- S. M. Sze and K. K. Ng, Physics of Semiconductor Devices (John Wiley & Sons, New York, 2007).
- (2007) Physics of Semiconductor Devices
- Sze, S.M.¹ Ng, K.K.²

22
- 64549084039
- 10.1088/0957-4484/20/5/055302
- J.-S. Hwang, L.-W. Chen, T.-C. Chen, C.-W. Kuo, Z.-S. Hu, T.-R. Tsai, Y.-J. Wu, T.-Y. Lin, Y.-Y. Jhuo, C.-Y. Cheng, C.-M. Lin, and Y.-H. Liu, Nanotechnology 20, 055302 (2009). 10.1088/0957-4484/20/5/055302
- (2009) Nanotechnology , vol.20 , pp. 055302
- Hwang, J.-S.¹ Chen, L.-W.² Chen, T.-C.³ Kuo, C.-W.⁴ Hu, Z.-S.⁵ Tsai, T.-R.⁶ Wu, Y.-J.⁷ Lin, T.-Y.⁸ Jhuo, Y.-Y.⁹ Cheng, C.-Y.¹⁰ Lin, C.-M.¹¹ Liu, Y.-H.¹²

23
- 27844448749
- Raman scattering of polar modes of ZnO crystallites
- DOI 10.1063/1.2126784, 093507
- L. Bergman, X. B. Chen, J. Huso, J. L. Morrison, and H. Hoeck, J. Appl. Phys. 98, 093507 (2005). 10.1063/1.2126784 (Pubitemid 41653697)
- (2005) Journal of Applied Physics , vol.98 , Issue.9 , pp. 1-4
- Bergman, L.¹ Chen, X.-B.² Huso, J.³ Morrison, J.L.⁴ Hoeck, H.⁵

24
- 79956060574
- Nitrogen-related local vibrational modes in ZnO:N
- DOI 10.1063/1.1461903
- A. Kaschner, U. Haboeck, Martin Strassburg, Matthias Strassburg, G. Kaczmarczyk, A. Hoffmann, C. Thomsen, A. Zeuner, H. R. Alves, D. M. Hofmann, and B. K. Meyer, Appl. Phys. Lett. 80, 1909 (2002). 10.1063/1.1461903 (Pubitemid 34326236)
- (2002) Applied Physics Letters , vol.80 , Issue.11 , pp. 1909
- Kaschner, A.¹ Haboeck, U.² Strassburg, M.³ Strassburg, M.⁴ Kaczmarczyk, G.⁵ Hoffmann, A.⁶ Thomsen, C.⁷ Zeuner, A.⁸ Alves, H.R.⁹ Hofmann, D.M.¹⁰ Meyer, B.K.¹¹

25
- 33748877561
- Nitrogen-doped p-type ZnO films prepared from nitrogen gas radio-frequency magnetron sputtering
- DOI 10.1063/1.2337766
- M.-L. Tu, Y.-K. Su, and C.-Y. Ma, J. Appl. Phys. 100, 053705 (2006). 10.1063/1.2337766 (Pubitemid 44422054)
- (2006) Journal of Applied Physics , vol.100 , Issue.5 , pp. 053705
- Tu, M.-L.¹ Su, Y.-K.² Chun-Yang, M.³

26
- 4444247599
- 10.1109/TMAG.2004.829166
- J. I. Shirakashi and Y. Takemura, IEEE Trans. Magn. 40, 2640 (2004). 10.1109/TMAG.2004.829166
- (2004) IEEE Trans. Magn. , vol.40 , pp. 2640
- Shirakashi, J.I.¹ Takemura, Y.²

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