메뉴 건너뛰기




Volumn 101, Issue 4, 2007, Pages

Growth behavior of oxide nanostructures by electrical and thermal conductivities of substrate in atomic force microscope nano-oxidation

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; GROWTH (MATERIALS); OXIDATION; THERMAL CONDUCTIVITY;

EID: 33847651272     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2434983     Document Type: Article
Times cited : (7)

References (26)
  • 19
  • 24
    • 33847668078 scopus 로고    scopus 로고
    • Process of Technology Vol. 2nd ed. (Lattice, Sunset Beach
    • S. Wolf and R. N. Tauber, Silicon Processing for the VLSI Era, Process of Technology Vol. 1, 2nd ed. (Lattice, Sunset Beach, 2000), p. 324.
    • (2000) Silicon Processing for the VLSI Era , vol.1 , pp. 324
    • Wolf, S.1    Tauber, R.N.2
  • 25
    • 0004165928 scopus 로고    scopus 로고
    • McGraw-Hill, Hsinchu, Taiwan
    • C. Y. Chang and S. M. Sze, ULSI Technology (McGraw-Hill, Hsinchu, Taiwan, 1996), p. 171.
    • (1996) ULSI Technology , pp. 171
    • Chang, C.Y.1    Sze, S.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.