Investigation of the effect of metastable atoms on mode transition in argon inductive discharge via a hybrid model

Journal of Physics D: Applied Physics

Volumn 43, Issue 27, 2010, Pages

  Zhao, Shu Xia ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COIL CURRENT; DYNAMIC CHARACTERISTICS; ELECTRICAL PARAMETER; ELECTRON DENSITIES; ENERGY DISTRIBUTION FUNCTIONS; HYBRID MODEL; INDUCTIVE DISCHARGES; METASTABLE ATOMS; MODE TRANSITIONS; MULTI-STEP; NONLINEAR MECHANISMS; PLASMA CONDITIONS; PLASMA DYNAMICS; PLASMA PARAMETER; POWER DEPOSITION;

ARGON; DISTRIBUTION FUNCTIONS; DYNAMICS; ELECTRIC DISCHARGES; HYSTERESIS; MAGNETOHYDRODYNAMICS; PLASMA DENSITY; PLASMA DEPOSITION; PLASMA DIAGNOSTICS; PLASMAS;

ATOMS;

EID: 77953910272     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/27/275203     Document Type: Article

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