Electrical characterization of an inductively coupled gaseous electronics conference reference cell

Journal of Applied Physics

Volumn 104, Issue 8, 2008, Pages

  Singh, S V ^a   Pargmann, C ^b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b GERMAN AEROSPACE CENTER DLR   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; ARGON; COLLISION AVOIDANCE; DISCHARGE (FLUID MECHANICS); DISTRIBUTION FUNCTIONS; ELASTICITY; ELECTROSTATICS; HYSTERESIS; INERT GASES; PLASMA DEVICES; PLASMAS; THEOREM PROVING;

ANTENNA CURRENTS; ANTENNA VOLTAGES; DISCHARGE CONDITIONS; ELECTRICAL CHARACTERIZATIONS; ELECTRICAL PARAMETERS; ELECTRON DENSITIES; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTROSTATIC COUPLINGS; EXTERNAL-; FARADAY SHIELDS; FLOATING POTENTIALS; GAS PRESSURES; GASEOUS ELECTRONICS; INDUCTIVELY COUPLED ARGON DISCHARGES; MATCHING NETWORKS; MODE TRANSITIONS; OPERATIONAL PARAMETERS; PLASMA PARAMETERS; PLASMA POTENTIALS; POWER COUPLING EFFICIENCIES; RADIO FREQUENCIES; ROGOWSKI COILS; SMOOTH TRANSITIONS; TO MODES;

ELECTRIC DISCHARGES;

EID: 55249122470     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3000667     Document Type: Article

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