Observation of second harmonic currents in inductively coupled plasmas

Physical Review Letters

Volumn 83, Issue 8, 1999, Pages 1610-1612

  Godyak, V A ^a   Piejak, R B ^a   Alexandrovich, B M ^a  

^a OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001246635     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.83.1610     Document Type: Article

References (14)

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