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Volumn 105, Issue 8, 2009, Pages

Fluid simulation of the E-H mode transition in inductively coupled plasma

Author keywords

[No Author keywords available]

Indexed keywords

DISCHARGE MECHANISMS; DYNAMIC CHARACTERISTICS; E AND H MODES; ELECTRIC PARAMETERS; ELECTROMAGNETIC THEORIES; EVOLUTION CHARACTERISTICS; FLUID MODELS; FLUID SIMULATIONS; MODE TRANSITIONS; PLASMA PARAMETERS; RADIO FREQUENCIES; SELF-CONSISTENT METHODS; SUBSTANTIAL VARIATIONS;

EID: 65449156763     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3112009     Document Type: Article
Times cited : (38)

References (34)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.