Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model

Journal of Physics D: Applied Physics

Volumn 42, Issue 22, 2009, Pages

  Zhao, Shu Xia ^a   Gao, Fei ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BULK PLASMA; COIL CURRENT; DIELECTRIC WINDOWS; DISTRIBUTION AREA; DYNAMIC CHARACTERISTICS; ELECTRON DENSITY PROFILES; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; EXPERIMENTAL MEASUREMENTS; GAS PRESSURES; HIGH PRESSURE; HYBRID MODEL; INDUCTIVE FIELD; LOW ENERGY ELECTRONS; LOW PRESSURES; LOW TEMPERATURES; MODE TRANSITIONS; NONLOCAL PROPERTIES; PURE FLUIDS; RATE COEFFICIENTS; REACTION CHAMBERS;

DIELECTRIC MATERIALS; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRON ENERGY ANALYZERS; HYBRID SENSORS; INDUCTIVELY COUPLED PLASMA; PLASMA DENSITY; PLASMA FLOW; REFLECTIVE COATINGS; TEMPERATURE CONTROL;

ELECTRON TEMPERATURE;

EID: 70450205335     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/22/225203     Document Type: Article

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