Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma

Physics of Plasmas

Volumn 15, Issue 6, 2008, Pages

  Ding, Z F ^a   Yuan, G Y ^a   Gao, W ^a   Sun, J C ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CAPACITANCE; CONTROL THEORY; DISCHARGE (FLUID MECHANICS); FEEDBACK; FLUID MECHANICS; IMPEDANCE MATCHING (ELECTRIC); INDUCTIVELY COUPLED PLASMA; INERT GASES; MECHANISMS; MILITARY DATA PROCESSING; PHOTOACOUSTIC EFFECT; PHOTORESISTS; PLASMA SOURCES; PLASMAS; TURBULENT FLOW;

AMERICAN INSTITUTE OF PHYSICS (AIP); APPLIED (CO); ARGON GAS; COUPLED PLASMAS; DISCHARGE MODES; DISCHARGE TRANSITIONS; ELECTROMAGNETIC MODES; EXPERIMENTAL PARAMETERS; HYSTERETIC LOOPS; IMPEDANCE MATCHING; L-SHAPED; MATCHING NETWORKS; MODE TRANSITIONS; NEGATIVE FEEDBACK (NFB); OUTPUT POWERS; PHYSICAL MECHANISMS; RADIO FREQUENCY INDUCTIVELY COUPLED PLASMA (RF/ICP); RF POWERING; SERIES CAPACITANCE; UNDERLYING MECHANISM;

ELECTRIC DISCHARGES;

EID: 46349105063     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2931038     Document Type: Article

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