Hysteresis in the E- to H-mode transition in a planar coil, inductively coupled rf argon discharge

Journal of Physics D: Applied Physics

Volumn 31, Issue 21, 1998, Pages 3082-3094

  El Fayoumi, I M ^a   Jones, I R ^a   Turner, M M ^b  

^a FLINDERS UNIVERSITY   (Australia)

^b DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON NUMBER DENSITY; INDUCTION COIL; INDUCTIVELY COUPLED RF PLASMA SOURCES;

ARGON; ELECTRIC DISCHARGES; ELECTRIC NETWORK ANALYSIS; ELECTROMAGNETIC FIELD THEORY; ELECTRON TRANSITIONS; HYSTERESIS; ION BOMBARDMENT; PLASMA DENSITY; PLASMA DEVICES;

PLASMA SOURCES;

EID: 0032494610     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/21/014     Document Type: Article

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