Argon metastables in a high density processing plasma

Journal of Applied Physics

Volumn 83, Issue 6, 1998, Pages 2971-2979

  Leonhardt, D ^a   Eddy Jr , C R ^a,b   Shamamian, V A ^a   Fernsler, R F ^a,c   Butler, J E ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b Code 6671 ^*  (United States)

^c Plasma Physics Division   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005852492     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367123     Document Type: Article

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