Influence of Metastable Atoms in Radio-Frequency Argon Discharges

IEEE Transactions on Plasma Science

Volumn 31, Issue 6 II, 2003, Pages 1292-1298

  Roberto, Marisa ^a   Smith, Helen B ^b   Verboncoeur, John P ^b  

^a INSTITUTO TECNOLÓGICO DE AERONÁUTICA   (Brazil)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Argon metastable atoms; One dimensional planar simulation; Particle in cell (PIC) with Monte Carlo collisions

Indexed keywords

ARGON; COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTRIC POTENTIAL; IONIZATION; MATHEMATICAL MODELS; MICROELECTRONICS; PLASMA DENSITY; PLASMA SHEATHS; PRESSURE EFFECTS; QUENCHING;

ARGON METASTABLE ATOMS; ONE-DIMENSIONAL PLANAR SIMULATION; PARTICLE-IN-CELL (PIC) WITH MONTE CARLO SIMULATIONS;

HIGH ENERGY PHYSICS;

EID: 1442360955     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2003.820682     Document Type: Article

References (33)

1. C. M. Ferreira and A. Ricard, "Modeling of the low-pressure argon positive-column," J. Appl. Phys., vol. 54, pp. 2261-2271, May 1983.
2. A. D. Richards, B. E. Thompson, and H. H. Sawin. "Continuum modeling of argon radio frequency glow-discharge," Appl. Phys. Lett., vol. 50, pp. 492-494, Sept. 1987.
3. E. Gogolides, J. P. Nicolai, and H. H. Sawin, "Comparison of experimental measurements and model predictions for radio-frequency Ar discharges and SF6 discharges," J. Vac. Sci. Technol., pt. 1, vol. A7, pp. 1001-1006, May 1989.
4. K. Okazaki, T. Makabe, and Y. Yamaguchi, "Modeling of a RE glow-discharge plasma,"Appl. Phys. Lett., vol. 54, pp. 1742-1744, May 1989.
5. M. S. Barnes, T. J. Cotler, and M. E. Elta, "Large-signal time-domain modeling of low-pressure RF glow discharges," J. Appl. Phys., vol. 61, pp. 81-89, Jan. 1987.
6. M. Meyyappan, "A continuum model for low-pressure radio frequency discharges." J. Appl. Phys., vol. 69, pp. 8047-8051, Jun. 1991.
7. H. W. Trombley, F. L. Terry Jr., and M. E. Elta, "A self-consistent particle model for the simulation of RF glow-discharges," IEEE Trans. Plasma Sci., vol. 19, pp. 158-162, Apr. 1991.
8. J. Vlcek, "A collisional-radiative model applicable to argon discharges over a wide range of conditions. I. Formulation and basic data, " J. Phys. D, Appl. Phys., vol. 22, pp. 623-631, May 1989.
9. J. Vlcek and V. Pelikan, "A collisional-radiative model applicable to argon discharges over a wide range of conditions. II. Application to low-pressure hallow-cathode arc and low-pressure glow-discharges," J. Phys. D, Appl. Phys., vol. 22. pp. 632-643, May 1989.
10. A. V. Phelps, "Cross sections and swarm coefficients for nitrogen ions and neutrals in N2 and argon ions and neutrals in Ar for energies from 0.1 eV to 10 keV," J. Phys. Chem. Ref. Data, vol. 20, pp. 557-573, Mar. 1991.
11. M. Mitchner and C. H. Kruger, Partially Ionized Gases. New York: Wiley, 1973.
12. H. W. Drawin, "Fontenay-aux-Roses report," EUR-CEA-FC, 1967.
13. A. Chutjian and D. C. Cartwright, "Electron-impact excitation of electronic states in argon at incident energies between 16 to 100 eV," Phys. Rev. A, Gen, Phys., vol. 23, pp. 2178-2194, May 1981.
14. I. Y. Baranov, V. I. Demidov, and N. B. Kolokolov, "Temperature-dependence of rate constants for metastable atomic-argon damage by slow-electrons," Opt. Spektrosk., vol. 51, pp. 571-574, Apr. 1981.
15. K. Bartschat and V. Zeman, "Electron-impact excitation from the 3p(5)4s metastable states of argon," Phys. Rev. A, vol. 59, pp. 2552-2554, Apr. 1999.
16. K. Kano, M. Suzuki, and H. Akatsuka, "Spectroscopic measurement of electron temperature and density in argon plasmas based on collisional-radiative model," Plasma Sources Sci. Technol., vol. 9, pp. 314-322, Mar. 2000.
17. R. Raghavan and P. W. Morrison Jr., "Infrared characterization of a cascaded arc plasma," J. Quant. Spectrosc. Rad. Transf. vol. 69, pp. 605-634, May 2001.
18. J. P. Verboncoeur, M. V. Alves, V. Vahedi, and C. K. Birdsall, "Simultaneous potential and circuit solution for 1-D bounded plasma particle simulation codes," J. Comput. Phys., vol. 104, pp. 321-328, Feb. 1993.
19. J. B. Boffard, G. A. Piech, M. F. Gehrke, L. W. Anderson, and C. C. Lin, "Measurement of electron-impact excitation cross sections out of metastable levels of argon and comparison with ground-state excitation," Phys. Rev. A, Gen. Phys., vol. 59, pp. 2749-2763, Apr. 1999.
20. C. K. Birdsall, "Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC," IEEE Trans. Plasma Sci., vol. 19, pp. 65-85, Apr. 1991.
21. V. Vahedi and M. Surendra, "A Monte Carlo collision model for the particle-in-cell method: Applications to argon and oxygen discharges," Comput. Phys. Commun., vol. 87, pp. 179-198, May 1995.
22. D. H. Madison, C. M. Maloney, and J. B. Wang, "Integral and differencial cross section for electron-impact excitation of 12 of the lowest states of argon," J. Phys. B, At. Mol. Opt. Phys., vol. 31, pp. 873-893, Feb. 1998.
23. F. J. D. Heer, R. H. J. Jansen, and W. VanderKaay, "Total cross sections for electron-scattering by Ne, Ar, Kr and Xe," J. Phys. B, At. Mol. Opt., vol. 12, pp. 979-1002, June 1979.
24. J. Ferch, B. Granitza, and C. Masche et al., "Electron argon total crosssection measurements at low energies by time-of-fight spectroscopy," J. Phys. B, At. Mol. Opt., vol. 18, pp. 967-983, 1985.
25. D. Margreiter, H. Deutsch, and T. D. Mark, "Absolute electron-impact cross-sections for single ionization of metasable atoms of H, He, Ne, Ar, Kr, Xe, and Rn," Contr. Plasma Phys., vol. 30, pp. 487-495, Apr. 1990.
26. H. Deustsch and T. D. Mark, "Calculation of absolute electron-impact ionization cross-section functions for single ionization of He, Ne, Ar. Kr, Xe, N, and F," Int. J. Mass Spectrom., vol. 79, pp. R1-R8, Nov. 1987.
27. E. Krishnakumar and S. K. Srivastava, "Ionization cross section of rare-gas atoms by electron-impact," J. Phys. B, At. Mot. Opt., vol. 21, pp. 1055-1082, Mar. 1988.
28. T. Okada and M. Sugawara, "Determination of ionization cross sections for argon metastable-metastable collision by means of afterglow technique," Jpn J. Appl. Phys., vol. 35, pp. 4535-4540, Aug. 1996.
29. E. W. McDaniel, Collision Phenomena in Ionised Gases. New York: Wiley, 1964.
30. D. Rapp and W. E. Francis, "Charge exchange between gaseous ions and atoms."J. Chem. Phys., vol. 37, p. 2631, 1962.
31. V. Vahedi, G. DiPeso, C. K. Birdsall, M. A. Lieberman, and T. D. Rognlien, "Capacitive RF discharges modeled by particle-in-cell Monte Carlo simulation 1: Analysis of numerical techniques," Plasma Sources Sci. Technol., vol. 2, pp. 261-272, July 1993.
32. V. Vahedi, C. K. Birdsall, M. A. Lieberman, G. DiPeso, and T. D. Rognlien, "Capacitive RF discharges modeled by particle-in-cell Monte Carlo simulation II: Comparisons with laboratory measurements of electron energy distribution function," Plasma Sources Sci. Technol., vol. 2, pp. 273-278, July 1993.
33. D. P. Lymberopoulos and D. J. Economou, "Fluid simulation of glow-discharges: Effect of metaslable atoms in argon," J. Appl. Phys., vol. 73, pp. 3668-3679, Apr. 1993.