Two-dimensional simulation of a miniaturized inductively coupled plasma reactor

Journal of Applied Physics

Volumn 95, Issue 5, 2004, Pages 2272-2277

  Nam, Sang Ki ^a   Economou, Demetre J ^a  

^a University of Houston   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POWER DEPOSITION; SPATIAL DISTRIBUTION;

COMPUTER SIMULATION; ELECTRIC FIELDS; HEAT TRANSFER; INDUCTIVELY COUPLED PLASMA; MAGNETIC FIELDS; MASS SPECTROMETERS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PLASMA DENSITY; PLASMA DISPLAY DEVICES;

PLASMA THEORY;

EID: 1642358355     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1644043     Document Type: Article

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