Observation of inverse hysteresis in the e to H mode transitions in inductively coupled plasmas

Plasma Sources Science and Technology

Volumn 19, Issue 1, 2010, Pages

  Lee, Min Hyong ^a   Chung, Chin Wook ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY DISTRIBUTIONS; GAS PRESSURES; HIGH-ENERGY ELECTRON; INVERSE HYSTERESIS; LOW PRESSURES; MAXWELLIAN DISTRIBUTION; MODE TRANSITIONS;

ARGON; DISSOCIATION; ELECTRIC POWER DISTRIBUTION; ELECTRON ENERGY LEVELS; INDUCTIVELY COUPLED PLASMA; ION BEAMS; MOTION CONTROL;

HYSTERESIS;

EID: 76649123978     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/1/015011     Document Type: Article

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