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Volumn 37, Issue 16, 2004, Pages 2216-2222
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Analysis of the excited argon atoms in the GEC RF reference cell by means of one-dimensional PIC simulations
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
GROUND STATE;
HIGH PRESSURE EFFECTS;
IONIZATION;
MONTE CARLO METHODS;
PLASMA DENSITY;
PLASMAS;
RESONANCE;
CAPACITIVELY COUPLED PLASMAS (CCP);
EXCITED STATES (ES);
MONTE CARLO COLLISIONS (MCC);
PARTICLE-IN-CELL (PIC) SIMULATION;
ARGON;
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EID: 4344593055
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/37/16/002 Document Type: Article |
Times cited : (53)
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References (18)
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