In-situ Vapor-Phase Lubrication of MEMS

Tribology Letters

Volumn 29, Issue 1, 2008, Pages 67-74

  Asay, David B ^a   Dugger, Michael T ^b   Kim, Seong H ^a  

^a The Pennsylvania State University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE FORCE; MEMS SURFACES;

ADHESION; ALCOHOLS; MEMS; SURFACE ANALYSIS;

LUBRICATION;

ADHESION; ALCOHOLS; LUBRICATION; MEMS; SURFACE ANALYSIS;

EID: 37549007881     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-007-9283-0     Document Type: Article

References (19)

1. Chau, K.H.-L., Lewis, S.R., Zhao, Y., Howe, R.T., Bart, S.F., Marcheselli, R.G.: An integrated force-balanced capacitive accelerometer for low-g applications. Sens. Actuators A 54, 472-476 (1996)
2. Eaton, W.P., Smith, J.H.: Micromachined pressure sensors: review and recent developments. Smart Mater. Struct. 6, 530-539 (1997)
3. Verdonckt-Vandebroek, S.: Micromachining technology for thermal ink jet products. Proceedings of SPIE-Micromachined Devices and Components III, 3224, 180-184 (1997)
4. Fan, L.-S., Tai, Y.-C., Muller, R.S.: IC-processed electrostatic micromotors. Sens. Actuators 20, 41-47 (1989)
5. Henck, S.A.: Lubrication of digital micromirror devicesTM. Tribol. Lett. 3, 239-247 (1997)
6. Maboudian, R., Ashurst, W.R., Carraro, C.: Tribological challenges in microelectromechanical systems. Tribol. Lett. 12, 95-100 (2002)
7. Maboudian, R.: Surface processes in MEMS technology. Surf. Sci. Rep. 30, 207-269 (1998)
8. Baker, M.A., Li, J.: The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS. Surf. Interface Anal. 38, 863-867 (2006)
9. Liu, H., Bhushan, B.: Investigation of nanotribological properties of self-assembled monolayers with alkyl and biphenyl spacer chains (Invited). Ultramicroscopy 91, 185-202 (2002)
10. Xiao, X., Hu, J., Charych, D.H., Salmeron, M.: Chain length dependence of the frictional properties of alkylsilane molecules self-assembled on mica studied by atomic force microscopy. Langmuir 12, 235-237 (1996)
11. Strawhecker, K., Asay, D.B., McKinney J., Kim, S.H.: Reduction of adhesion and friction of silicon oxide surface in the presence of n-propanol vapor in the gas phase. Tribol. Lett. 19, 17-21 (2005)
12. Asay, D.B., Kim, S.H.: Molar volume and adsorption isotherm dependence of capillary forces in nano-asperity contacts. Langmuir 23, 12174-12178 (2007)
13. Timpe, S.J., Komvopoulos, K.: An experimental study of sidewall adhesion in microelectromechanical systems. J. Microelectromech Syst 14(6), 1356-1363 (2005)
14. Mayer, T.M., DeBoer M.P., Shinn, N.D., Clews P.J., Michalske T.A.: Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems. J. Vac. Sci. Technol. B 18, 2433-2440 (2000)
15. Patton, S.T., Zabinski, J.S.: Failure mechanisms of a MEMS actuator in very high vacuum. Tribol. Int. 35, 373-379 (2002)
16. Komvopoulos, K., Yan, W.: A fractal analysis of stiction in microelectromechanical systems. J. Tribol. 119 (3), 391-400 (1997)
17. Segade, L, de Llano, J.J., Dominguez-Perez, M., Cabeza, O., Cabanas, M., Jimenez. E.: Density, surface tension, and refractive index of octane + 1-alkanol mixtures at T = 298.15K. J. Chem. Eng. Data 48, 1251-1255 (2003)
18. Adamson A.W., Gast A.P.: Physical Chemistry of Surfaces, 6th edn. Wiley, New York (1997)
19. Graham, E.E., Klaus, E.E.: Lubrication from the vapor-phase at high-temperatures. ASLE Trans. 29 (2), 229-234 (1986)