Preparation and tribological properties of multiply-alkylated cyclopentane (MAC)-octadecyltrichlorosilane (OTS) double-layer film on silicon

Wear

Volumn 263, Issue 7-12 SPEC. ISS., 2007, Pages 1000-1007

  Ma, J Q ^a,b   Pang, C J ^a,b   Mo, Y F ^a,b   Bai, M W ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Durability; MAC; OTS; SAM; Tribology

Indexed keywords

ATOMIC FORCE MICROSCOPY; DURABILITY; FILM THICKNESS; FRICTION; SILICON;

LUBRICANT FILM; MULTIPLY-ALKYLATED CYCLOPENTANE; WORN SURFACES;

TRIBOLOGY;

ATOMIC FORCE MICROSCOPY; DURABILITY; FILM THICKNESS; FRICTION; SILICON; TRIBOLOGY;

EID: 34548015892     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2006.12.019     Document Type: Article

References (31)

1. Spearing S.M. Materials issues in microelectromechanical systems (MEMS). Acta Mater. 48 (2000) 179-196
2. Bhushan B., Kulkarni A.V., Boehm M., Koinkar V.N., Odoni L., Martelet C., and Belin M. Microtribological characterization of self-assembled and Langmuir-Blodgett monolayers by atomic and friction force microscopy. Langmuir 11 (1995) 3189-3198
3. Liu H., Ahmed I.U., and Scherge M. Microtribological properties of silicon and silicon coated with diamond like carbon, octadecyltrichlorosilane and stearic acid cadmium salt films: a comparative study. Thin Solid Films 381 (2001) 135-142
4. Touzov I., and Gorman C.B. Tip-induced structural rearrangements of alkanethiolate self-assembled monolayers on gold. J. Phys. Chem. B 101 (1997) 5263-5276
5. Cha K.H., and Kim D.E. Investigation of the tribological behavior of octadecyltrichlorosilane deposited on silicon. Wear 251 (2001) 1169-1176
6. Clear S.C., and Nealey P.F. Lateral force microscopy study of the frictional behavior of self-assembled monolayers of octadecyltrichlorosilane on silicon/silicon dioxide. Langmuir 17 (2001) 720-732
7. Gautheir S., Aime J.P., Bouhacina T., Attias A.J., and Desbat B. Study of grafted silane molecules on silica surface with an atomic force microscope. Langmuir 12 (1996) 5126-5137
8. Ren S.L., Yang S.R., and Zhao Y.P. Micro- and macro-tribological study on a self-assembled dual-layer film. Langmuir 19 (2003) 2763-2767
9. Choudross M., Grest G.S., and Stevens M.J. Friction between alkylsilane monolayers: molecular simulation of ordered monolayers. Langmuir 18 (2002) 8392-8399
10. Eapen K.C., Patton S.T., and Zabinski J.S. Lubrication of microelectromechanical (MEMS) using bound and mobile phase of Fomblin Zdol. Tribol. Lett. 12 (2002) 35-41
11. Wasserman S.R., Tao Y.T., and Whitesides G.M. Structure and reactivity of alkylsiloxane monolayers formed by reaction of alkyltrichlorosilanes on silicon substrates. Langmuir 5 (1989) 1074-1087
12. Ruehe J., Novotny V.J., Kanazawa K.K., Clarke T., and Street G.B. Structure and tribological properties of ultrathin alkylsilane films chemisorbed to solid surfaces. Langmuir 9 (1993) 2383-2388
13. Patton S.T., William D.C., Eapen K.C., and Zabinski J.S. Effect of surface chemistry on the tribological performance of a MEMS electrostatic lateral output motor. Tribol. Lett. 9 (2000) 199-209
14. Rye R.R., Nelson G.C., and Dugger M.T. Mechanistic aspects of alkylchlorosilane coupling reactions. Langmuir 13 (1997) 2965-2972
15. Hsu S.M. Nano-lubrication: concept and design. Tribol. Int. 37 (2004) 537-545
16. C.G. Venier, E.W. Casserly. Lubricants comprising novel cyclopentanes cyclopenta-dienes, cyclopentenes and mixtures thereof and methods of manufacture, U.S. Patent 4,929,782 (1990).
17. Venier C.G., and Casserly E.W. Multiply-alkylated cyclopentanes (MACs): a new class of synthesized hydrocarbon fluids. Lubr. Eng. 47 (1991) 586-591
18. Dube M.J., Bollea D., Jones Jr. W.R., Marrcheti M., and Jansen M.J. A new synthetic hydrocarbon liquid lubricant for space application. Tribol. Lett. 15 (2003) 3-8
19. Tillman N., Ulman A., Schildkraut J.S., and Penner T.L. Incorporation of phenoxy groups in self-assembled monolayers of trichlorosilane derivatives. Effects on film thickness, wettability, and molecular orientation. J. Am. Chem. Soc. 110 (1998) 6136-6144
20. 2. Langmuir 19 (2002) 1159-1167
21. Khurshudov A., and Waltman R.J. Tribology challenges of modern magnetic hard disk drives. Wear 251 (2001) 1124-1132
22. Bai M., and Kato K. Modeling and analysis of contact deformation and stiction between textured disk and textured slider. ASME J. Tribol. 123 (2001) 350-357
23. Hsu S.M. Molecular basis of lubrication. Tribol. Int. 37 (2004) 553-559
24. Wang M., Liechti K.M., Wang Q., and White J.M. Self-assembled monolayers: fabrication with nanoscale uniformity. Langmuir 21 (2005) 1848-1857
25. Tupper K.J., and Brenner D.W. Molecular dynamics simulations of friction in self-assembled monolayers. Thin Solid Films 253 (1994) 185-189
26. Ren S.L., Yang S.R., Zhao Y.P., Zhou J.F., Xu T., and Liu W.M. Friction and wear studies of octadecyltrichlorosilane SAM on silicon. Tribol. Lett. 13 (2002) 233-239
27. Sung I.H., Yang J.C., Kim D.E., and Shin B.S. Micro-/nano-tribological characteristics of self-assembled monolayer and its application in nano-structure fabrication. Wear 255 (2003) 808-818
28. Yu B., Zhou F., Mu Z.G., Liang Y.M., and Liu W.M. Tribological properties of ultra-thin ionic liquid films on single-crystal silicon wafers with functionalized surfaces. Tribol. Int. 39 (2006) 879-887
29. Choi J., Kanwaguchi M., and Kato T. Nanoscale lubricant with strongly bonded phase and mobile phase. Tribol. Lett. 15 (2003) 353-358
30. Choi J., Morishita H., and Kato T. Frictional properties of bilayered mixed lubricant films on an amorphous carbon surface: effect of alkyl chain length and SAM/PFPE portion. Appl. Surf. Sci. 228 (2004) 190-191
31. Guiggan P.M., Zhang J., and Hsu S.M. Comparison of friction measurements using the atomic force microscope and the surface forces apparatus: the issue of scale. Tribol. Lett. 10 (2001) 217-223