Tribology of PFPE overcoated self-assembled monolayers deposited on Si surface

Journal of Physics D: Applied Physics

Volumn 38, Issue 18, 2005, Pages 3512-3522

  Satyanarayana, N ^a   Sinha, Sujeet K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; FLUORINE CONTAINING POLYMERS; FRICTION; HEAT TREATMENT; INTERFACIAL ENERGY; POLYETHERS; SELF ASSEMBLY; SILICON; SURFACE TREATMENT; WEAR OF MATERIALS; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

PERFLUOROPOLYETHER (PFPE); ULTRA-THIN LAYERS; WEAR-LIFE;

MONOLAYERS;

EID: 24644511084     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/38/18/029     Document Type: Article

References (46)

1. Bhushan B 1991 Handbook of Micro/Nano Tribology (Boca Raton, FL: CRC Press)
2. Komvopoulos K 1996 Surface engineering and microtribology for microelectromechanical systems Wear 200 305-27
3. Spearing S M 2000 Materials issues in microelectromechanical systems (MEMS) Acta Mater. 48 179-96
4. Srinivasan U, Houston M R, Howe R T and Maboudian R 1998 Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines J. Microelectromech. Syst. 7 252-60
5. Rymuza Z 1999 Control tribological and mechanical properties of MEMS surfaces Microsyst. Technol. 5 173-80
6. Bhushan B, Israelachvili J N and Landman U 1995 Nanotribology: friction, wear and lubrication at the atomic scale Nature 374 607-16
7. Ulman A 1991 Introduction to Ultra Thin Organic Films (San Diego, CA: Academic)
8. Bhushan B, Kulkarni A V, Koinkar V N, Boehm M, Odoni L, Martelet C and Belin M 1995 Microtribological characterization of self-assembled and Langmuir-Blodgett monolayers by atomic and friction force microscopy Langmuir 11 3189-98
9. Clechet P, Martelet C, Belin M, Zarrad H, Jaffrezic-Renault N and Fayeulle S 1994 Lubrication of silicon micromechanisms by chemical grafting of long-chain molecules Sensors Actuators A 44 77-81
10. Wang W, Wang Y, Bao H, Xiong B and Bao M 2002 Friction and wear properties in MEMS Sensors Actuators A 97-98 486-91
11. Ando E, Goto Y, Morimoto K, Ariga K and Okahata Y 1989 Frictional properties of monomolecular layers of silane compounds Thin Solid Films 180 287-91
12. Koinkar V N and Bhushan B 1996 Microtribological studies of unlubricated and lubricated surfaces using atomic force/ friction force microscopy J. Vac. Sci. Technol. A 14 2378-91
13. Tsukruk V V 2001 Molecular lubricants and glues for micro- and nanodevices Adv. Mater. 13 95-108
14. Rye R R, Nelson G C and Dugger M T 1997 Mechanistic aspects of alkylchlorosilane coupling reactions Langmuir 13 2965-72
15. Deng K, Collins R J, Mehregany M and Sukenik C N 1995 Performance impact of monolayer coating of polysilicon micromotors J. Electrochem. Soc. 142 1278-85
16. DePalma V and Tillman N 1989 Friction and wear of self-assembled trichlorosilane monolayer films on silicon Langmuir 5 868-72
17. Ren S, Yang S, Zhao Y, Zhou J, Xu T and Liu W 2002 Friction and wear studies of octadecyltrichlorosilane SAM on silicon Tribol. Lett. 13 233-9
18. de Boer M P and Mayer T M Tribology of MEMS Bulletin (April 2001) 302-4
19. Ahn H-S, Julthongpiput D, Kim D-I and Tsukruk V V 2003 Dramatic enhancement of wear stability in oil-enriched polymer gel nanolayers Wear 255 801-7
20. Katano T, Oka M, Nakazawa S, Aramaki T and Kusakawa K 2003 Characteristics of dual lubricant layers IEEE Trans. Magn. 39 2489-91
21. Chen C-Y, Bogy D and Bhatia C S 2001 Effect of lubricant bonding fraction at the head-disk interface Tribol. Lett. 10 195-202
22. Sinha S K, Kawaguchi M, Kato T and Kennedy F E 2003 Wear durability studies of ultra-thin perfluoropolyether lubricant on magnetic hard disks Tribol. Int. 36 217-25
23. Choi J, Morishita H and Kato T 2004 Frictional properties of bilayered mixed lubricant films on an amorphous carbon surface: effect of alkyl chain length and SAM/PFPE portion Appl. Surf. Sci. 228 191-200
24. Eapen K C, Patton S T and Zabinski J S 2002 Lubrication of microelectromechanical systems (MEMS) using bound and mobile phases of Fomblin Zdol® Tribol. Lett. 12 35
25. Julthongpiput D 2003 Design of nanocomposite polymer coatings for MEMS applications PhD Thesis Iowa State University
26. Liu H and Bhushan B 2003 Nanotribological characterization of molecularly thick lubricant films for applications to MEMS/NEMS by AFM Ultramicroscopy 97 321-40
27. Lumbantobing A, Kogut L and Komvopoulos K 2004 Electrical contact resistance as a diagnostic tool for MEMS contact interfaces J. Microelectromech. Syst. 13 977-87
28. Ruhe J, Novotny V, Kanazawa K K, Clarke T and Street G B 1993 Structure and tribological properties of ultrathin alkylsilane films chemisorbed to solid surfaces Langmuir 9 2383-8
29. Bhushan B, Liu H and Hsu S M 2004 Adhesion and friction studies of silicon and hydrophobic and low friction films and investigation of scale effects J. Tribol. 126 583-90
30. Mastrangelo C H 1997 Adhesion-related failure mechanisms in micromechanical devices Tribol. Lett. 3 223-38
31. Maboudian R and Howe R T 1997 Stiction reduction processes for surface micromachines Tribol. Lett. 3 215-21
32. Zhang F and Srinivasan M P 2004 Self-assembled molecular films of aminosilanes and their immobilization capacities Langmuir 20 2309-14
33. Cant N E, Critchley K, Zhang H-L and Evans S D 2003 Surface functionalisation for the self-assembly of nanoparticle/polymer multilayer films Thin Solid Films 426 31-9
34. Ruhe J, Novotny V, Clarke T and Street G B 1996 Ultrathin perfluoropolyether films-influence of anchoring and mobility of polymers on the tribological properties J. Tribol. 118 663-8
35. Zarrad H, Chovelon J M, Clechet P, Jaffrezic-Renault N, Martelet C, Belin M, Perez H and Chevalier Y 1995 Optimization of lubricants for silica micromotors Sensors Actuators A 46-47 598-600
36. Satyanarayana N, Sinha S K and Srinivasan M P 2004 Friction and wear life evaluation of silane-based self-assembled monolayers on silicon surface Life Cycle Tribology ed D Dowson, M Priest and A Neville (Amsterdam: Elsevier) at press
37. Makkonen L 2004 Friction as a result of surface tension 27th Annual Meeting of the Adhesion Society (Wilmington, NC, USA) pp 399-401
38. Mate C M 1992 Atomic-force-microscope study of polymer lubricants on silicon surfaces Phys. Rev. Lett. 68 3323-6
39. Lio A, Charych D H and Salmeron M 1997 Comparative atomic force microscopy study of the chain length dependence of frictional properties of alkanethiols on gold and alkylsilanes on mica J. Phys. Chem. B 101 3800-5
40. Choi J and Kato T 2003 Development of the mixed nanolubricant system by FDTS islands and PFPE mobile phase IEEE Trans. Magn. 39 2444-6
41. Pettersson U and Jacobson S 2003 Influence of surface texture on boundary lubricated sliding contacts Tribol. Int. 36 857-64
42. Choi J, Kawaguchi M and Kato T 2004 Spreading of perfluoropolyethers on FDTS-coated amorphous carbon surfaces IEEE Trans. Magn. 40 3189-91
43. Novotny V J 1990 Migration of liquid polymers on solid surfaces J. Chem. Phys. 92 3189-96
44. Pooley C M and Tabor D 1972 Friction and molecular structure: the behavior of some thermoplastics Proc. R. Soc. Lond. A 329 251-74
45. Patton S T, Cowan W D, Eapen K C and Zabinski J S 2000 Effect of surface chemistry on the tribological performance of a MEMS electrostatic lateral output motor Tribol. Lett. 9 199-209
46. Ruhe J, Blackman G, Novotny V J, Clarke T, Street G B and Kuan S 1994 Terminal attachment of perfluorinated polymers to solid surfaces J. Appl. Polym. Sci. 53 825-36