Dynamics of vapor-phase organophosphates on silicon and OTS

Tribology Letters

Volumn 27, Issue 3, 2007, Pages 269-276

  Neeyakorn, Worakarn ^a   Varma, Manju ^a   Jaye, Cherno ^a   Burnette, James E ^a   Lee, Sang M ^a   Nemanich, Robert J ^a   Grant, Christine S ^b   Krim, Jacqueline ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b North Carolina State University   (United States)

Author keywords

Friction; Nanotribology; QCM; SAMS; Silicon; Vapor phase lubricants

Indexed keywords

INTERFACIAL SLIPPAGE; OSCILLATORY MOTION; VAPOR PHASE LUBRICANTS;

MEMS; NANOTRIBOLOGY; POLYCRYSTALLINE MATERIALS; SILICON; SUBSTRATES; VISCOELASTICITY;

QUARTZ CRYSTAL MICROBALANCES;

MEMS; NANOTRIBOLOGY; POLYCRYSTALLINE MATERIALS; QUARTZ CRYSTAL MICROBALANCES; SILICON; SUBSTRATES; VISCOELASTICITY;

EID: 34547211720     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-007-9224-y     Document Type: Article

References (33)

1. Maboudian, R., Carraro C.: Surface engineering for reliable operation of MEMS devices, J. Adhesion Sci. Technol. 17 583-592 (2003);
2. Maboudian, R., Howe, R.T.: Stiction reduction processes for surfacemicromachines, Tribology Lett. 3 215-222 (1997);
3. Hsu, S.M., Ying, Z.C.: Nanotribology: Critical Assessment and Research Needs (2002);
4. B. Bhushan, Tribology of MEMS Components and Materials, (1998)
5. Dugger, M.T., Senft, D.C., Nelson, G.C.: In: Tsukruk V.V., Wahl K.J. (eds.) Microstructures and Tribology of Polymer Surfaces, pp. 455. American Chemical Society, Washington D.C. (1999)
6. Ashurst, W.R., Carraro, C., Maboudian, R., Frey, W.: Wafer level anti-stiction coatings for MEMS Sensors and Actuators, A-Physical 104 213-221 (2003);
7. Ashurst, W.R., Yau C., Carraro, C., Howe, R. T., Maboudian, R.: Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS, Sensors and Actuators, A91 239-248 (2001)
8. Placek, D.G., Freiheit T.: Progress in vapor phase lubrication technology, J. of Eng. for Gas Turbines and Power, 115 700-705 (1993);
9. Rao, A.M.N.: Lubrication Engineering, Vapor-phase lubrication : Application-oriented development, 52(12), 855-862 (1996)
10. Faut, O.D., Wheeler, D.: On the Mechanism of Lubrication by Tricresylphosphate (TCP)-the Coefficient of Friction as a Function of Temperature for TCP on M-50 Steel, ASLE Trans. 26 344-350 (1983)
11. Forster, N., Trivedi, H.K.: Rolling contact testing of vapor-phase lubricants. Part I. Material evaluation, Tribology Trans. 40(3) 421-428 (1997);
12. Forster N.: Rolling contact testing of vapor-phase lubricants. Part III. Surface analysis, Tribology Trans. 40(1) 1-10 (1999);
13. Forster, N.: Rolling contact testing of vapor-phase lubricants. Part IV. Diffusion mechanisms, Tribology Trans. 42(1) 10-20 (1999)
14. Abdelmaksoud, M., Bender, J., Krim, J.: Bridging the Gap between Macro- and Nanotribology: A Quartz Crystal Microbalance Study of Tricresylphosphate Uptake on Metal and Oxide Surfaces, Phys. Rev. Lett. 92 (2004) art. no 176101;
15. Abdelmaksoud, M., Bender, J., Krim, J.: Nanotribology of a Vapor-Phase Lubricant: A Quartz Crystal Microbalance Study of Tricresylphosphate (TCP) Uptake on Iron and Chromium, Tribology Lett. 13 179-186 (2002)
16. Krim, J., Abdelmaksoud, M.: In: Bhushan, B. (ed.) Tribology Issues and Opportunities in MEMS, pp. 273-284. Kluwer, Dordrecht (1998)
17. Applications of Piezoelectric Quartz Crystal Microbalances, C. Lu and A. Czanderna. Elsevier, Amsterdam (1984)
18. You-Ting Wu, Akoto-Ampaw, P.J., Elbaccouch, M., Hurrey, M.L., Wallen, S.L. Grant, C.S.: Quartz crystal microbalance (QCM) in high-pressure carbon dioxide (CO2): Experimental aspects of QCM theory and CO2 adsorption, Langmuir 20 3665-3673 (2004);
19. Wu, Y., Grant, C.S.: In: Encyclopedia of Nanoscience and Nanotechnology, Schwarz, J.A., et al., (eds), pp. 1977-1990, Marcel Dekker, New York (2003)
20. Krim, J., Solina, D.H., Chiarello, R.: Nanotribology of a Kr monolayer: A quartz-crystal microbalance study of atomic-scale friction, Phys. Rev. Lett. 66 181-184 (1991)
21. Borovsky, B., Mason, B.L., Krim, J.: Scanning tunneling microscope measurements of the amplitude of vibration of a quartz crystal oscillator, J. Appl. Phys. 88 4017-4021 (2000);
22. Borovsky, B., Mason, B.L., Krim, J.: Scanning tunneling microscope measurements of the amplitude of vibration of a quartz crystal oscillator, J. Appl. Phys. 88 4017-4021 (2000);
23. Borovsky, B., Krim, J., Asif, S.A.S., Wahl, K.J.: Measuring nanomechanical properties of a dynamic contact using an indenter probe and quartz crystal microbalance, J. Appl. Phys., 90 6391-6396 (2001); Laschitsch, A., Johannsmann, D.: High frequency tribological investigations on quartz resonator surfaces, J. Appl. Phys. 85 3759-3765 (1999)
24. Krim, J., Widom, A.: Damping of a crystal oscillator by an adsorbed monolayer and its relation to interfacial viscosity, Phys. Rev. 38 12184-12189 (1988)
25. Watts, E., Krim, J., Widom, A.: Experimental observation of interfacial slippage at the boundary of molecularly thin films with gold substrates, Phys. Rev. B 41 3466-3472 (1990)
26. Fisher Scientific, pure meta isomer
27. Durad 620B, FMC Corp, Philadelphia, PA
28. Maxtek Inc. 5980 Lakeshore Drive, Cypress CA 90630
29. Hussain, Y.A., Krim, J., Grant, C.S.: Colloids and Surfaces Aphysiochemical and Engineering Aspects 262 (1-3): 81-86 Jul 15 2005;
30. Hussain, Y.A.: M.S. dissertation, North Carolina State University (2004)
31. Brzoska J.B., Azouz I.B., Rondelez F.: Silanization of Solid Substrates: A Step Toward Reproducibility, Langmuir 10 4367-4373 (1994)
32. Ulman A.: An Introduction to Ultrathin Organic Films: From Langmuir-Blodgett to Self-Assembly. Academic Press, San Diego (1991)
33. Eapen D.C., Patton S.T., Zabinski J.S.: Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fomblin Zdol®, Trib. Letts. 12 35-41 (2002)