Autocollimators for deflectometry: Current status and future progress

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 616, Issue 2-3, 2010, Pages 140-146

  Geckeler, Ralf D ^a   Just, Andreas ^a   Krause, Michael ^a   Yashchuk, Valeriy V ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Angle; Angle calibration; Autocollimator; Precision metrology; Topography measurement; Traceability

Indexed keywords

ANGLE CALIBRATION; ANGLE METROLOGY; ANGULAR RESPONSE; AUTOCOLLIMATORS; CURRENT STATUS; DEFLECTOMETRY; FUTURE CHALLENGES; OPTIMAL APPLICATIONS; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; PRECISION METROLOGY; SURFACE PROFILOMETERS; TOPOGRAPHY MEASUREMENT;

CALIBRATION; PROFILOMETRY;

MEASUREMENTS;

EID: 77950807364     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2009.11.021     Document Type: Article

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