Optimized use and calibration of autocollimators in deflectometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6704, Issue , 2007, Pages

  Geckeler, Ralf D ^a   Just, Andreas ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Angle; Angle calibration; Autocollimator; Deflectometry; Flatness standard; Precision metrology; Traceability

Indexed keywords

OPTICAL DEVICES; PROFILOMETRY; TOPOGRAPHY;

ANGLE CALIBRATION; AUTOCOLLIMATOR; DEFLECTOMETRY; EXTENDED SHEAR ANGLE DIFFERENCE (ESAD); PRECISION METROLOGY;

ANGLE MEASUREMENT;

EID: 42149156225     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.732384     Document Type: Conference Paper

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