An angular reversal technique for error separation between a dual axis electronic autocollimator and a PZT tilting platform

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

Volumn 2, Issue , 2007, Pages 121-124

  Probst, R ^a   Futterer G ^a   Illemann, J ^a   Mokro', J ^b   Lui, P K ^c   Bachish, E ^d  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b SLOVAK INSTITUTE OF METROLOGY   (Slovakia)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^d SAINT PETERSBURG ELECTROTECHNICAL UNIVERSITY LETI   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ERRORS;

AUTOCOLLIMATORS; CROSS-TALK ERRORS; DUAL AXIS; ERROR SEPARATION; NON-LINEAR SCALING; REPRODUCIBILITIES; REVERSAL TECHNIQUES; TIP/TILT PLATFORM;

PRECISION ENGINEERING;

EID: 77950828382     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Evans, C.J., Hocken, R.J. and Estl er, W.T., Self-Calibration: reversal, redundancy, error separation, and "absolute testing", Annals of the CIRP, Vol. 45/ 2, 1996, pp. 617-34
2. Physikinstrumente (PI) GmbH &Co., Datasheet Piezo Tip/Tilt Platform S 340
3. Moeller-Wedel Optical GmbH, Datasheet Elcomat HR