Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 616, Issue 2-3, 2010, Pages 212-223

  Yashchuk, Valeriy V ^a   Barber, Samuel ^a   Domning, Edward E ^a   Kirschman, Jonathan L ^a   Morrison, Gregory Y ^a   Smith, Brian V ^a   Siewert, Frank ^b   Zeschke, Thomas ^b   Geckeler, Ralf ^c   Just, Andreas ^c  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b HAHN MEITNER INSTITUT   (Germany)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Autocollimator; Long trace profiler; Pentaprism; Surface metrology; Surface profilometer; Surface slope measurement; X ray optics

Indexed keywords

AUTOCOLLIMATORS; LONG TRACE PROFILER; SURFACE METROLOGY; SURFACE PROFILOMETERS; SURFACE SLOPE;

INSTRUMENTS; PRISMS; PROFILOMETRY;

MEASUREMENTS;

EID: 77950979143     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2009.10.175     Document Type: Article

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