Positioning errors of pencil-beam interferometers for long trace profilers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6317, Issue , 2006, Pages

  Yashchuk, Valeriy V ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Beam positioning; Error reduction; Long trace profiler; LTP; Optical metrology; Pencil beam interferometer

Indexed keywords

OPTICAL RESOLVING POWER; OPTICAL SYSTEMS; PARAMETER ESTIMATION; RANDOM PROCESSES; RAY TRACING; SIGNAL NOISE MEASUREMENT; DENSITY (OPTICAL); LASER BEAMS; NATURAL FREQUENCIES; SPECTRUM ANALYSIS; X RAY OPTICS;

BEAM POSITIONING; ERROR REDUCTIONS; LONG TRACE PROFILERS (LTP); OPTICAL METROLOGY;

INTERFEROMETERS;

AIR CONVECTION; ERROR REDUCTION; LONG TRACE PROFILER (LTP); OPTICAL METROLOGY; PENCIL-BEAM INTERFEROMETERS; POINTING STABILITY;

EID: 33750581508     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.677956     Document Type: Conference Paper

References (24)

1. E. L. Church, P. Z. Takacs, Use of an optical profiling instrument for the measurement of the figure and finish of optical quality surfaces, Wear, 109 (1986), 241-57.
2. P. Z. Takacs, Shinan Qian, J. Colbert, Design of a long trace surface profiler, Proceedings of SPIE 749 (1987), 59-64.
3. P. Z. Takacs, S. K. Feng, E. L. Church, Shinan Qian, W-M. Liu, Long trace profile measurements on cylindrical aspheres, Proceedings of SPIE, 966 (1989), 354-64.
4. S. C. Irick. W. R. McKinney, Advancements in one-dimensional profiling with a long trace profiler, Proceedings of SPIE, 1720 (1992), 162-8.
5. S. C. Irick, W. R. McKinney, D. L. Lunt, P. Z. Takacs, Using a straightness reference in obtaining more accurate surface profiles from a long trace profiler (for synchrotron optics), Rev. Sci. Instrum., 63(1), 1436-8 (1992).
6. S. C. Irick, Improved measurement accuracy in a long trace profiler: compensation for laser pointing instability, Nuclear Instruments & Methods in Physics Research A-Accelerators Spectrometers Detectors & Associated Equipment, 347(1-3), 226-30 (1994).
7. S. C. Irick, Determine surface profile from sequential interference patterns from a long tracer profiler (for synchrotron optics), Rev. Sci. Instrum. 63(1) (1992) 1432-5.
8. Shinan Qian, H. Li, P. Z. Takacs, Penta-Prism Long Trace Profiler (PPLTP) for measurement of grazing incidence space optics, Proceedings of SPIE, 2805 (1996), 108-14.
9. P. Z. Takacs, Shinan Qian, T. Kester, H. Li, Large-mirror figure measurement by optical profilometry techniques, Proceedings of SPIE, 3782 (1999), 266-74.
10. Shinan Qian, G. Sostero, P. Z. Takacs, Precision calibration and systematic error reduction in the Long Trace Profiler, Proceedings of SPIE, 3782 (1999), 627-36.
11. Shinan Qian, Sostero G, P. Z. Takacs, Precision calibration and systematic error reduction in the long trace profiler, Optical Engineering, 39(1) (2000), 304-10.
12. P. Z. Takacs, Shinan Qian, Accuracy limitations in long-trace profilometry, AIP Conference Proceedings, 708 (2004), 831-4.
13. Shinan Qian, W. Jark, P. Z. Takacs, The penta-prism LTP: a long-trace-profiler with stationary optical head and moving penta prism, Rev. Sci. Instrum. 66(3) (1995), 2562-9.
14. P. Z. Takacs, C. J. Bresloff, Significant improvements in long trace profiler measurement performance, Proceedings of SPIE 2856 (1996), 236-45.
15. P. Z. Takacs, E. L. Church, C. J. Bresloff, L. Assoufid, Improvements in the accuracy and the repeatability of long trace profiler measurements, Applied Optics, 38(25) (1999), 5468-79.
16. Shinan Qian, P. Z. Takacs, Equal optical path beamsplitter for a pencil beam interferometer and shearing interferometer, Optical Engineering 42(no.4) (2003).929-34.
17. V. V. Yashchuk, S. C. Irick, A. A. MacDowell, Elimination of 'ghost'-effect-related systematic errors in metrology of X-ray optics with a long trace profiler, Proceedings of SPIE 5858-34 (2005).
18. R. L. Plackett, Principles of Regression Analysis (Oxford, At The Clarendon Press, 1960).
19. D. J. Hudson, Statistics: Lectures on Elementary Statistics and Probability (Geneva, 1964; In Russian:
20. D. J. Hudson, Statistics for Physicists, Moscow, Mir, 1970).
21. J. Neter and W. Wasserman, Applied Linear Statistical Models (London, Inwin-Dorsey International, 1974).
22. M. Kendall and A. Stuart, The Advance theory of Statistics, vol.2 (New York, Oxford University Press, 1979).
23. Hamamatsu Photonics K.K., Specification: NMOS Linear Image Sensor S3901/S3904 series (http://usa.hamamatsu.com).
24. PerkinElmer Optoelectronics Inc., RETICON™; L-series Linear CMOC Spectroscopy Sensor (www.perkinelmer.com/opto).