The Nanometer Optical Component Measuring Machine: A new Sub-nm Topography Measuring Device for X-ray Optics at BESSY

AIP Conference Proceedings

Volumn 705, Issue , 2004, Pages 847-850

  Siewert, Frank ^a   Noll, Tino ^a   Schlegel, Thomas ^a   Zeschke, Thomas ^a   Lammert, Heiner ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77950850815     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1757928     Document Type: Conference Paper

References (7)

1. Lammert, H. . Nanometer Optical Components for Synchrotron Radiation Beamlines., BESSY annual report, Berlin, 2001, 301-304. www.bessy. de
2. Takacs, P. Z., Qian, S., . United States Patent 4884697., 1989
3. Assoufid, L., Hignette, O., Howells, M., Irick, S., Lammert, H., Takacs, P. . Future metrology needs for synchrotron radiation grazing-incidence optics., SRI2000, Nuclear Instruments and Methods in Physics Research, A 467-468, 2000, 399-403.
4. Lammert, H., et al . Engineering aspects for the conception of the BESSY II beamlines., SRI2000, Nuclear Instruments and Methods in Physics Research, A 467-468, 2000, 488-491.
5. Takacs, P. Z., and Qian, S., . Profilometry of X-ray Optics: Current Progress., www.inst. bnl. gov, BNL, Brookhaven, 2002,. 6 www.moeller-wedel-optical. com
6. Lammert, H. Noll, T., Schlegel, T., Siewert, F., Zeschke, T. . The Nanometer Optical Component Measuring machine . NOM . at BESSY., BESSY annual report, Berlin, 2002, 399-403. www.bessy. de
7. Schindler, A., Haensel, T., Nickel, A., Thomas, H. J., Lammert, H., Siewert, F. . Finishing Procedure for High Performance Synchrotron Optics,. SPIEs 48th Annual Meeting, San Diego, 2003