Novel scanning technique for ultra-precise measurement of topography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3782, Issue , 1999, Pages 306-317

  Weingaertner, Ingolf ^a   Schulz, Michael ^a   Elster, Clemens ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPHERICS; ERRORS; INTERFEROMETRY; PRISMS; SCANNING; SURFACE MEASUREMENT; SURFACE TESTING;

COMPLEX SURFACES; DIFFERENCE MEASUREMENT; FLATS; NANOMETRY; WHOLE BODY MOVEMENTS;

SURFACE TOPOGRAPHY;

EID: 0033343741     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)