Enhancement of high-resolution electronic autocollimators by application of phase grating technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5856 PART II, Issue , 2005, Pages 950-959

  Fütterer, Gerald ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Angle metrology; Autocollimator; Simulation, uncertainty; Small apertures; Varying working distance

Indexed keywords

ABERRATIONS; COHERENT LIGHT; COMPUTER SIMULATION; COMPUTER SOFTWARE; OPTICAL RESOLVING POWER; OPTICAL VARIABLES MEASUREMENT;

ANGLE METROLOGY; AUTOCOLLIMATORS; SIMULATION, UNCERTAINTY; SMALL APERTURES; VARYING WORKING DISTANCE;

DIFFRACTION GRATINGS;

EID: 28844499507     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.612745     Document Type: Conference Paper

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