Distance-dependent influences on angle metrology with autocollimators in deflectometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7077, Issue , 2008, Pages

  Geckeler, Ralf D ^a   Just, Andreas ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Angle; Angle calibration; Autocollimator; Deflectometry; Flatness standard; Precision metrology; Traceability

Indexed keywords

ANGLE MEASUREMENT; CALIBRATION; COMPARATORS (OPTICAL); LIGHT; MEASUREMENTS; PRINTED CIRCUIT BOARDS; SURFACES;

ANGLE; ANGLE CALIBRATION; AUTOCOLLIMATOR; DEFLECTOMETRY; FLATNESS STANDARD; PRECISION METROLOGY; TRACEABILITY;

STANDARDS;

EID: 56249136540     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.793742     Document Type: Conference Paper

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