Use and traceable calibration of autocollimators for ultra-precise measurement of slope and topography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4401, Issue , 2001, Pages 184-195

  Geckeler, Ralf ^a   Weingärtner, Ingolf ^a   Just, Andreas ^a   Probst, Reinhard ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Angle; Autocollimator; Dimensi onal metrology; Nanometrology; Slope; Topography; Traceability

Indexed keywords

ALGORITHMS; CALIBRATION; COMPARATORS (OPTICAL); DIFFRACTION GRATINGS; INTERFEROMETRY; LIGHT REFLECTION; MEASUREMENT ERRORS; PHOTOELECTRIC DEVICES; SCANNING; STANDARDS; SURFACE TOPOGRAPHY;

AUTOCOLLIMATORS; DIMENSIONAL METROLOGY; EXTENDED SHEAR ANGLE DIFFERENCE; NANOMETROLOGY; OPTICAL PHASE GRATING; PHOTOELECTRIC READING HEADS; TRACEABLE CALIBRATION;

OPTICAL COLLIMATORS;

EID: 0035760597     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445620     Document Type: Article

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