Sub-nm Topography Measurement using High-accuracy Autocollimators;Sub-nm-Topographiemessung mit hochgenauen Autokollimatoren

Technisches Messen

Volumn 69, Issue 12, 2002, Pages 535-541

  Geckeler, Ralf D ^b   Just, Andreas ^a   Probst, Reinhard ^a   Weingärtner, Ingolf ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b NONE

Author keywords

Angle measurement; Autocollimator; Flatness standard; Traceability

Indexed keywords

AUTOCOLLIMATORS; FLATNESS STANDARD; HIGHLY ACCURATE; OPTICAL SURFACES; PROPAGATION OF LIGHTS; REPRODUCIBILITIES; TOPOGRAPHY MEASUREMENT; TRACEABILITY;

ANGLE MEASUREMENT; METRIC SYSTEM;

TOPOGRAPHY;

EID: 0042417221     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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7. C. Elster, I. Weingärtner, Appl. Optics, 38 (1999), S. 5024-5031.
8. R.D. Geckeler, I. Weingärtner, Proc. SPIE, 4779 (2002), im Druck.