Surface deformations of optical elements - An investigation of optical systems using the BESSY-NOM

AIP Conference Proceedings

Volumn 879, Issue , 2007, Pages 679-682

  Zeschke, Thomas ^a   Follath, Rolf ^a   Lammert, Heiner ^a   Senf, Friedmar ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Adaptive optic; Cooling; Deflectometry; Metrology; Mirror support; NOM

Indexed keywords

EID: 33947360622     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2436153     Document Type: Conference Paper

References (6)

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2. P.Z. Takacs, S.N. Quian, Surface Profiling Interferometer, U.S. Patent No. 4.884.697, 1989.
3. Discussion and collaboration with A. Seifert, Carl Zeiss Laser Optics GmbH, Dec. 2005.
4. E. Oberg et. al., Machinery's Handbook, edited by R. E. G., Ind. Press Inc., New York, 1992, pp. 220-221.
5. R. Mitzner et al., "An X-ray autocorrelator and delay line for the VUV-FEL at TTF/DESY", Proc. SPIE 5920, San Diego, 2005.
6. M. R. Weiss et al., "The elliptically polarized undulator beamlines at BESSY II", Nuclear Instruments & Methods in Physics Research, Section A, Vol.467-468, pt.1, Elsevier Science, 2001, pp. 449-452.