Advanced metrology, an essential support for the surface finishing of high performance x-ray optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5921, Issue , 2005, Pages 1-11

  Siewert, Frank ^a   Lammert, Heiner ^a   Noll, Tino ^a   Schlegel, Thomas ^a   Zeschke, Thomas ^a   Hänsel, Thomas ^b   Nickel, Andreas ^b   Schindler, Axel ^b   Grubert, Bernd ^c   Schlewitt, Carsten ^c  

^a HAHN MEITNER INSTITUT   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^c Moeller Wedel GmbH   (Germany)

Author keywords

Ion Beam Figuring; LTP; Metrology; NOM; X ray optics

Indexed keywords

DATA ACQUISITION; ERROR ANALYSIS; FREE ELECTRON LASERS; ION BEAMS; OPTICAL DEVICES; SYNCHROTRON RADIATION;

ION BEAM FIGURING; LTP; NOM;

X RAY OPTICS;

EID: 31844453293     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.622747     Document Type: Conference Paper

References (21)

1. H. Lammert, F. Senf, M. Berger, Improvement of Synchrotron radiation Mirrors below the 0,1 arcsec rms Error Limit with the Help of a Long Trace Profiler, SPIE's Proc. Vol. 3152, p 168-179, San Diego, 1997
2. Heiner Lammert, Nanometer Optical Components for Synchrotron Radiation, BEESY annual report 2001, www.bessy.de, p 301-305, Berlin 2002
3. Heiner Lammert, Frank Siewert, Optical SR components below the 0.1 arcsec limit: The key for this accuracy is the measurement technique, Second International Workshop on Metrology for X-ray Optics, Grenoble 2004
4. Takacs, P.Z., Qian, S., United States Patent 4884697, 1989
5. Assooufid, L., Hignette, O., Howells, M., Irick, S., Lammert, H., Takacs, P. Future metrology needs for synchrotron radiation grazing-incidence optics, SRI2000, Nuclear Instruments and Methods in Physics Research, A 467-468, 2000, 399-403
6. MOELLER-WEDEL OPTICAL GmbH, www.moeller-wedel-optical.com
7. Heiner Lammert, Tino Noll, Thomas Schlegel, Frank Siewert, Thomas Zeschke, The Nanometer Optical Component Measuring Machine - NOM- at BESSY, BESSY annual report 2002, www.bessy.de, p 399-402, Berlin 2003
8. Frank Siewert, Tino Noll, Thomas Schlegel, Thomas Zeschke and Heiner Lammert, The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY, Mellville, New York, 2004, AIP Conference Proceedings, Volume 705, p. 847-850
9. Frank Siewert, Tino Noll, Thomas Schlegel, Thomas Zeschke and Heiner Lammert, The BESSY-NOM (Nanometer optical component measuring Machine) a non contact Deflectometry Sub-nm Topography measuring Device for X-ray Optics, Second International Workshop on Metrology for X-ray Optics, Grenoble 2004
10. A. Just, M. Krause, R. Probst, R. Wittekopf, Calibration of high-resolution electronic autocollimators aginst an angle comparator, Metrologia 40 (2003) 288-294
11. I. Weingärtner, C. Elster, J. Gerhardt, H. Winkler, M. Schulz, C. Hellwig, I. Rieck, E. Lehberger, Stitching-Verfahren und Stitching- Interferometrie, 104. Jahrestagung der DGaO, Münster 2003
12. Frank Siewert, Heiner Lammert, The Nano Optic Measuring machine - NOM - High Accuracy with Deflectometry, HLEM on Production metrology for Precision Surfaces, Braunschweig 2004
13. R.D. Geckeler, I. Weingärtner, Sun-nm topography measurement by deflectometry: flatness standard and wafer nanotopography, Proc. SPIE, 4779, 1-12, 2002
14. M. Thomasset, D. Cocco, F. Siewert, A. Rommeveaux, V. Schoenherr, First report on a European round robin for slope measuring profilers, San Diego 2005, this conference
15. th Annual Meeting, San Diego, Ca, 2003
16. T. Hansel, A. Nickel, A. Schindler, H.J. Thomas, Ion beam figuring surface finishing of x-ray and synchrotron beam line optics using stitching interferometry for the surface topology measurement, OCIS codes: 220.4610 Optical fabrication, 340.7470 X-ray mirrors
17. Heiner Lammert, Tino Noll, Thomas Schlegel, Fres Senf, Frank Siewert, Thomas Zeschke, Breakthrough in the Metrology and Manufacture of Optical Components for Synchrotron Radiation, BESSY Annual Report 2003, www.bessy.de, Berlin 2004
18. Frank Siewert, Kai Godehusen, Heiner Lammert, Thomas Schlegel, Fred Senf, Thomas Zeschke, Thomas Hänsel, Andreas Nickel, Axel Schindler, NOM measurement supported ion beam finishing of a plane-elliptical refocussing mirror for the UE52-SGM1 beamline at BESSY, BESSY Annual Report 2003, www.bessy.de, Berlin 2004
19. K. Holldack, T. Zeschke, F. Senf, C. Jung, R. Follath, D. Ponwitz, A Microfocus Imaging System, BESSY annual report, www.bessy.de, p. 336-338, Berlin 2000
20. Heiner Lammert, NOK-NOM-Schlussbericht, Nanometer-Optikkomponenten für die Synchrotronstrahlung, Messen und Endbearbeitung bis in den Subnanometer-Bereich unter λ/1000, Berlin 2004
21. D. Krämer, E. Jaeschke, W. Eberhardt, The BESSY Soft X-ray Free Electron Laser - Technical Design Report, www.bessy.de/publicRelations/ publications. March 2004, Berlin