Proposal for a universal test mirror for characterization of slope measuring instruments

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6704, Issue , 2007, Pages

  Yashchuk, Valeriy V ^a   McKinney, Wayne R ^a   Warwick, Tony ^a   Noll, Tino ^b   Siewert, Frank ^b   Zeschke, Thomas ^b   Geckeler, Ralf D ^c  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b HAHN MEITNER INSTITUT   (Germany)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Calibration; Long trace profiler; LTP; Slope measuring instrument; Systematic error reduction; Test mirror

Indexed keywords

FREE ELECTRON LASERS; LIGHT SOURCES; OPTICAL INSTRUMENTS; OPTICS; SYNCHROTRONS;

ADVANCED LIGHT SOURCE (ALS); LONG TRACE PROFILER (LTP); SLOPE MEASURING INSTRUMENT; TEST MIRROR;

MIRRORS;

EID: 42149119162     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.732719     Document Type: Conference Paper

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