ESAD shearing deflectometry: Potentials for synchrotron beamline metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6317, Issue , 2006, Pages

  Geckeler, Ralf D ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Autocollimator; Deflectometry; Pentaprism; Profilometry; Slope; Topography; Traceability

Indexed keywords

ERROR CORRECTION; INTERFEROMETERS; LIGHT PROPAGATION; OPTIMIZATION; PRISMS; PROFILOMETRY; SYNCHROTRON RADIATION; SYSTEMATIC ERRORS; TOPOLOGY;

AUTOCOLLIMATORS; DEFLECTOMETRY; EXTENDED SHEAR ANGLE DIFFERENCE (ESAD) METHOD; OPTICAL SURFACES; PENTAPRISMS;

OPTICAL SYSTEMS;

EID: 33750630882     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.716301     Document Type: Conference Paper

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