Error minimization in high-accuracy scanning deflectometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6293, Issue , 2006, Pages

  Geckeler, Ralf D ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Autocollimator; Deflectometry; Dimensional metrology; Flatness standard; Traceability; Transfer function

Indexed keywords

AUTOCOLLIMATORS; DEFLECTOMETRY; DIMENSIONAL METROLOGY; FLATNESS STANDARD; TRACEABILITY; TRANSFER FUNCTION;

ERROR ANALYSIS; OPTICAL COLLIMATORS; OPTIMIZATION; PRISMS; SCANNING;

OPTICAL DEVICES;

EID: 33750021697     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.679339     Document Type: Conference Paper

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