A MEMS reactor for atomic-scale microscopy of nanomaterials under industrially relevant conditions

Journal of Microelectromechanical Systems

Volumn 19, Issue 2, 2010, Pages 254-264

  Creemer, J Fredrik ^a   Helveg, Stig ^b   Kooyman, Patricia J ^a   Molenbroek, Alfons M ^b   Zandbergen, Henny W ^c,d   Sarro, Pasqualina M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b HALDOR TOPSØE A S   (Denmark)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d PRINCETON UNIVERSITY   (United States)

Author keywords

High resolution transmission electron microscopy (HRTEM); Membranes; Microhotplates; Microscopy; Nanoreactors; Nanostructured materials

Indexed keywords

ATOMIC LATTICE; ATOMIC SCALE; ATOMIC-SCALE RESOLUTION; CU NANOPARTICLES; HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPY (HRTEM); HRTEM IMAGES; LOW-THERMAL DRIFT; MICRO HOTPLATE; MICROELECTROMECHANICAL SYSTEMS; MICROHEATER; MICROHOTPLATES; MICROSCOPY; NANO-MATERIALS; PRESSURE RANGES; REACTIVE GAS; SHALLOW FLOW; SILICON NITRIDE MEMBRANE; TEM;

ATOMS; COMPOSITE MICROMECHANICS; ELECTRONS; MEMBRANES; MEMS; METHANOL; MICROELECTROMECHANICAL DEVICES; NANOPARTICLES; NANOREACTORS; NANOSTRUCTURED MATERIALS; PLATINUM; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 77950595773     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2041190     Document Type: Article

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