Micro-machined electron transparent alumina vacuum windows

Sensors and Actuators, A: Physical

Volumn 87, Issue 1-2, 2000, Pages 52-59

  Doll, T ^a   Hochberg, M ^a   Barsic, D ^a   Scherer, A ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; BRITTLENESS; COMPRESSIVE STRENGTH; ELECTRON SPECTROSCOPY; ELECTRON TRANSPORT PROPERTIES; ENERGY DISPERSIVE SPECTROSCOPY; MEMBRANES; MICROELECTROMECHANICAL DEVICES; POROUS MATERIALS; TENSILE STRENGTH;

COLLIMATED CHANNELING; ELECTRON TRANSMISSION; ELECTRON TRANSPARENT WINDOWS; POROUS ALUMINA MEMBRANES;

MICROMACHINING;

EID: 0034500046     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00461-1     Document Type: Article

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