Mems nanoreactor for atomic-resolution microscopy of nanomaterials in their working state

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 76-79

  Creemer, J F ^a   Helveg, S ^b   Hoveling, G H ^a   Ullmann, S ^b   Kooyman, P J ^a   Molenbroeke, A M ^b   Zandbergen, H W ^a   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b HALDOR TOPSØE A S   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT PRESSURES; ATOMIC RESOLUTION MICROSCOPY; ATOMIC SCALE; CU NANOPARTICLES; IN-SITU TEM; LOW-THERMAL DRIFT; MICROHEATER; NANO-MATERIALS; NANO-STRUCTURED CATALYST; REACTIVE GAS; SHALLOW FLOW; SPATIAL RESOLUTION; TEM; WORKING STATE; ZNO;

ATOMS; MEMS; METHANOL; MICROELECTROMECHANICAL DEVICES; NANOREACTORS; NANOSTRUCTURED MATERIALS; PLATINUM; SILICON NITRIDE; ZINC OXIDE;

TRANSMISSION ELECTRON MICROSCOPY;

EID: 65949087043     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805323     Document Type: Conference Paper

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