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Volumn 203, Issue 1-2, 2008, Pages 148-155

Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films

(5) Moser, M a Mayrhofer, P H a Szekely L b Safran G b Barna, P B b

a UNIVERSITY OF LEOBEN (Austria)

b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE (Hungary)

Author keywords

Elemental composition; Hardness; Pulsed magnetron sputtering; Structure; TiAlN; Yttrium

Indexed keywords

ALUMINUM COATINGS; ELECTRON TEMPERATURE; HARDENING; HARDNESS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION BOMBARDMENT; MAGNETRON SPUTTERING; SPUTTERING; STRUCTURE (COMPOSITION); THIN FILMS; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; YTTRIUM; YTTRIUM ALLOYS;

DC MAGNETRON SPUTTERING; ELEMENTAL COMPOSITIONS; OXIDATION PROTECTION; PLASMA ELECTRON TEMPERATURES; PULSED DC MAGNETRON SPUTTERING; PULSED MAGNETRON SPUTTERING; REACTIVE-ELEMENT EFFECT; TIALN;

ALUMINUM;

EID: 77649185164 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2008.08.042 Document Type: Article

Times cited : (33)

References (68)

1
- 0001940080
- W.D. Cho, H.Y. Sohn Eds, Warrendale, PA
- R. Cremer, M. Witthaut, D. Neuschütz, in: W.D. Cho, H.Y. Sohn (Eds.), Value-Edition-Metallurgy, The Minerals & Metals Society, Warrendale, PA, 1998, p. 249.
- (1998) Value-Edition-Metallurgy, The Minerals & Metals Society , pp. 249
- Cremer, R.¹ Witthaut, M.² Neuschütz, D.³

2
- 0036747872
- A. Hörling, L. Hultman, M. Oden, J. Sjolen, L. Karlsson, J. Vac. Sci. Technol., A20/5 (2002) 1815.
- (2002) J. Vac. Sci. Technol , vol.A20 5 , pp. 1815
- Hörling, A.¹ Hultman, L.² Oden, M.³ Sjolen, J.⁴ Karlsson, L.⁵

3
- 0038469634
- A. Kimura, M. Kawate, H. Hasegawa, T. Suzuki, Surf. Coat. Technol. 169-170 (2003) 367.
- (2003) Surf. Coat. Technol , vol.169-170 , pp. 367
- Kimura, A.¹ Kawate, M.² Hasegawa, H.³ Suzuki, T.⁴

4
- 0141886144
- P.H. Mayrhofer, A. Horling, L. Karlsson, J. Sjolen, T. Larsson, C. Mitterer, L. Hultman, Appl. Phys. Lett. 83/10 (2003) 2049.
- (2003) Appl. Phys. Lett , vol.83 , Issue.10 , pp. 2049
- Mayrhofer, P.H.¹ Horling, A.² Karlsson, L.³ Sjolen, J.⁴ Larsson, T.⁵ Mitterer, C.⁶ Hultman, L.⁷

5
- 29244486770
- K. Kutschej, P.H. Mayrhofer, M. Kathrein, P. Polcik, R. Tessadri, C. Mitterer, Surf. Coat. Technol. 200/7 (2005) 2358.
- (2005) Surf. Coat. Technol , vol.200 , Issue.7 , pp. 2358
- Kutschej, K.¹ Mayrhofer, P.H.² Kathrein, M.³ Polcik, P.⁴ Tessadri, R.⁵ Mitterer, C.⁶

6
- 33751089796
- P.H. Mayrhofer, D. Music, J.M. Schneider, J. Appl. Phys. 100/9 (2006) 094906.
- (2006) J. Appl. Phys , vol.100 , Issue.9 , pp. 094906
- Mayrhofer, P.H.¹ Music, D.² Schneider, J.M.³

7
- 32944455394
- P.H. Mayrhofer, D. Music, J.M. Schneider, Appl. Phys. Lett. 88/7 (2006) 071922.
- (2006) Appl. Phys. Lett , vol.88 , Issue.7 , pp. 071922
- Mayrhofer, P.H.¹ Music, D.² Schneider, J.M.³

8
- 25544459890
- W.D. Münz, J. Vac. Sci. Technol., A 4/6 (1986) 2717.
- (1986) J. Vac. Sci. Technol., A , vol.4-6 , pp. 2717
- Münz, W.D.¹

9
- 10944266550
- A. Hörling, L. Hultman, M. Oden, J. Sjolen, L. Karlsson, Surf. Coat. Technol.191/2-3 (2005) 384.
- (2005) Surf. Coat. Technol , vol.191 , Issue.2-3 , pp. 384
- Hörling, A.¹ Hultman, L.² Oden, M.³ Sjolen, J.⁴ Karlsson, L.⁵

10
- 33644978389
- V.H. Derflinger, A. Schutze, M. Ante, Surf. Coat. Technol. 200/16-17 (2006) 4693.
- (2006) Surf. Coat. Technol , vol.200 , Issue.16-17 , pp. 4693
- Derflinger, V.H.¹ Schutze, A.² Ante, M.³

11
- 0037440648
- S. PalDey, S.C. Deevi, Mater. Sci. Eng., A 342/1-2 (2003) 58.
- (2003) Mater. Sci. Eng., A , vol.342 , Issue.1-2 , pp. 58
- PalDey, S.¹ Deevi, S.C.²

12
- 14644418455
- K. Kutschej, P.H. Mayrhofer, M. Kathrein, P. Polcik, C. Mitterer, Surf. Coat. Technol. 188-89 (2004) 358.
- (2004) Surf. Coat. Technol , vol.188 -89 , pp. 358
- Kutschej, K.¹ Mayrhofer, P.H.² Kathrein, M.³ Polcik, P.⁴ Mitterer, C.⁵

13
- 0029409563
- A. Gil, B. Rajchel, N. Zheng, W.J. Quadakkers, H. Nickel, J. Mater. Sci. 30/22 (1995) 5793.
- (1995) J. Mater. Sci , vol.30 , Issue.22 , pp. 5793
- Gil, A.¹ Rajchel, B.² Zheng, N.³ Quadakkers, W.J.⁴ Nickel, H.⁵

14
- 3543073893
- B.A. Pint, Oxidation of Metals 45/1-2 (1996) 1.
- (1996) Oxidation of Metals , vol.45 , Issue.1-2 , pp. 1
- Pint, B.A.¹

15
- 84950154618
- H.J. Grabke, M. Schütze Eds, Wiley-VCH GmbH, Weinheim
- H.J. Grabke, M. Schütze (Eds.), Oxidation of Intermetallics, Wiley-VCH GmbH, Weinheim, 1998.
- (1998) Oxidation of Intermetallics

16
- 0032595002
- L.A. Donohue, D.B. Lewis, W.D. Munz, M.M. Stack, S.B. Lyon, H.W. Wang, D. Rafaja, Vacuum 55/2 (1999) 109.
- (1999) Vacuum , vol.55 , Issue.2 , pp. 109
- Donohue, L.A.¹ Lewis, D.B.² Munz, W.D.³ Stack, M.M.⁴ Lyon, S.B.⁵ Wang, H.W.⁶ Rafaja, D.⁷

17
- 0034318316
- W.S. Choi, S.K. Hwang, C.M. Lee, J. Vac. Sci. Technol., A 18/6 (2000) 2914.
- (2000) J. Vac. Sci. Technol., A , vol.18 , Issue.6 , pp. 2914
- Choi, W.S.¹ Hwang, S.K.² Lee, C.M.³

18
- 4243409713
- L.A. Donohue, I.J. Smith, W.D. Munz, I. Petrov, J.E. Greene, Surf. Coat. Technol. 94-95 (1997) 226.
- (1997) Surf. Coat. Technol , vol.94-95 , pp. 226
- Donohue, L.A.¹ Smith, I.J.² Munz, W.D.³ Petrov, I.⁴ Greene, J.E.⁵

19
- 34250019129
- M. Moser, P.H. Mayrhofer, Scr. Mater. 57/4 (2007) 357.
- (2007) Scr. Mater , vol.57 , Issue.4 , pp. 357
- Moser, M.¹ Mayrhofer, P.H.²

20
- 1842665106
- B.Y. Man, L. Guzman, A. Miotello, M. Adami, Surf. Coat. Technol. 180-181 (2004) 9.
- (2004) Surf. Coat. Technol , vol.180-181 , pp. 9
- Man, B.Y.¹ Guzman, L.² Miotello, A.³ Adami, M.⁴

21
- 0042328067
- P.J. Kelly, C.F. Beevers, P.S. Henderson, R.D. Arnell, J.W. Bradley, H. Bäcker, Surf. Coat. Technol. 174-175 (2003) 795.
- (2003) Surf. Coat. Technol , vol.174-175 , pp. 795
- Kelly, P.J.¹ Beevers, C.F.² Henderson, P.S.³ Arnell, R.D.⁴ Bradley, J.W.⁵ Bäcker, H.⁶

22
- 27844527045
- J.W. Lee, S.K. Tien, Y.C. Kuo, Thin Solid Films 494/1-2 (2006) 161.
- (2006) Thin Solid Films , vol.494 , Issue.1-2 , pp. 161
- Lee, J.W.¹ Tien, S.K.² Kuo, Y.C.³

23
- 33748546935
- H.C. Barshilia, K.S. Rajam, Surf. Coat. Technol. 201/3-4 (2006) 1827.
- (2006) Surf. Coat. Technol , vol.201 , Issue.3-4 , pp. 1827
- Barshilia, H.C.¹ Rajam, K.S.²

24
- 33750920868
- M. Audronis, P.J. Kelly, A. Leyland, A. Matthews, Thin Solid Films 515/4 (2006) 1511.
- (2006) Thin Solid Films , vol.515 , Issue.4 , pp. 1511
- Audronis, M.¹ Kelly, P.J.² Leyland, A.³ Matthews, A.⁴

25
- 5744230452
- J. Vlcek, A.D. Pajdarova, J. Musil, Contrib. Plasma Phys. 44/5-6 (2004) 426.
- (2004) Contrib. Plasma Phys , vol.44 , Issue.5-6 , pp. 426
- Vlcek, J.¹ Pajdarova, A.D.² Musil, J.³

26
- 0345711496
- A. Barna, B. Pécz, M. Menyhárd, Micron 30/3 (1999) 267.
- (1999) Micron , vol.30 , Issue.3 , pp. 267
- Barna, A.¹ Pécz, B.² Menyhárd, M.³

27
- 0002818165
- A. Barna, MRS Conf. Ser. vol. 254 (1991) 3.
- (1991) Ser , vol.254 , pp. 3
- Barna, A.¹ Conf, M.R.S.²

28
- 0036670866
- P.H. Mayrhofer, F. Kunc, J. Musil, C. Mitterer, Thin Solid Films 415/1-2 (2002) 151.
- (2002) Thin Solid Films , vol.415 , Issue.1-2 , pp. 151
- Mayrhofer, P.H.¹ Kunc, F.² Musil, J.³ Mitterer, C.⁴

29
- 0026875935
- G.M.P.W.C. Oliver, J. Mater. Res. 7 (1992) 1564.
- (1992) J. Mater. Res , vol.7 , pp. 1564
- Oliver, G.M.P.W.C.¹

30
- 85030580585
- Vers. 2006
- http://www.srim.org/, Vers. 2006.

31
- 0000235265
- J.P. Biersack, L. Haggmark, Nucl. Instrum. Methods 174 (1980) 257.
- (1980) Nucl. Instrum. Methods , vol.174 , pp. 257
- Biersack, J.P.¹ Haggmark, L.²

32
- 0003412161
- Pergamon Press, New York
- J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Matter, Pergamon Press, New York, 1996.
- (1996) The Stopping and Range of Ions in Matter
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

33
- 71749085178
- F. Adibi, I. Petrov, J.E. Greene, L. Hultman, J.E. Sundgren, J. Appl. Phys. 73/12 (1993) 8520.
- (1993) J. Appl. Phys , vol.73 , Issue.12 , pp. 8520
- Adibi, F.¹ Petrov, I.² Greene, J.E.³ Hultman, L.⁴ Sundgren, J.E.⁵

34
- 36449001627
- L. Hultman, J.E. Sundgren, J.E. Greene, D.B. Bergstrom, I. Petrov, J. Appl. Phys. 78/9 (1995) 5395.
- (1995) J. Appl. Phys , vol.78 , Issue.9 , pp. 5395
- Hultman, L.¹ Sundgren, J.E.² Greene, J.E.³ Bergstrom, D.B.⁴ Petrov, I.⁵

35
- 0142087594
- I. Petrov, P.B. Barna, L. Hultman, J.E. Greene, J. Vac. Sci. Technol., A 21/5 (2003) S117.
- (2003) J. Vac. Sci. Technol., A , vol.21 , Issue.5
- Petrov, I.¹ Barna, P.B.² Hultman, L.³ Greene, J.E.⁴

36
- 0035387764
- J.W. Bradley, H. Bäcker, P.J. Kelly, R.D. Arnell, Surf. Coat. Technol. 142-144 (2001) 337.
- (2001) Surf. Coat. Technol , vol.142-144 , pp. 337
- Bradley, J.W.¹ Bäcker, H.² Kelly, P.J.³ Arnell, R.D.⁴

37
- 0342468746
- J.W. Bradley, H. Bäcker, P.J. Kelly, R.D. Arnell, Surf. Coat. Technol. 135/2-3 (2001) 221.
- (2001) Surf. Coat. Technol , vol.135 , Issue.2-3 , pp. 221
- Bradley, J.W.¹ Bäcker, H.² Kelly, P.J.³ Arnell, R.D.⁴

38
- 0042328065
- H. Bäcker, P.S. Henderson, J.W. Bradley, P.J. Kelly, Surf. Coat. Technol. 174-175 (2003) 909.
- (2003) Surf. Coat. Technol , vol.174-175 , pp. 909
- Bäcker, H.¹ Henderson, P.S.² Bradley, J.W.³ Kelly, P.J.⁴

39
- 1842427357
- J.W. Lee, J.J. Cuomo, M. Bourham, J. Vac. Sci. Technol., A 22/2 (2004) 260.
- (2004) J. Vac. Sci. Technol., A , vol.22 , Issue.2 , pp. 260
- Lee, J.W.¹ Cuomo, J.J.² Bourham, M.³

40
- 31344444200
- T. Moiseev, D.C. Cameron, J. Vac. Sci. Technol., A 23/1 (2005) 66.
- (2005) J. Vac. Sci. Technol., A , vol.23 , Issue.1 , pp. 66
- Moiseev, T.¹ Cameron, D.C.²

41
- 28844453663
- M. Audronis, P.J. Kelly, R.D. Arnell, A. Leyland, A. Matthews, Surf. Coat. Technol. 200/5-6 (2005) 1366.
- (2005) Surf. Coat. Technol , vol.200 , Issue.5-6 , pp. 1366
- Audronis, M.¹ Kelly, P.J.² Arnell, R.D.³ Leyland, A.⁴ Matthews, A.⁵

42
- 21144468268
- I. Petrov, F. Adibi, J.E. Greene, W.D. Sproul, W.D. Münz, J. Vac. Sci. Technol.,A10/5 (1992) 3283.
- (1992) J. Vac. Sci. Technol , vol.A10 5 , pp. 3283
- Petrov, I.¹ Adibi, F.² Greene, J.E.³ Sproul, W.D.⁴ Münz, W.D.⁵

43
- 21344483325
- D.A. Glocker, J. Vac. Sci. Technol., A 11 (1993) 2989.
- (1993) J. Vac. Sci. Technol., A , vol.11 , pp. 2989
- Glocker, D.A.¹

44
- 0016083153
- J.A. Thornton, J. Vac. Sci. Technol. 11/4 (1974) 666.
- (1974) J. Vac. Sci. Technol , vol.11 , Issue.4 , pp. 666
- Thornton, J.A.¹

45
- 0032045625
- P.B. Barna, M. Adamik, Thin Solid Films 317/1-2 (1998) 27.
- (1998) Thin Solid Films , vol.317 , Issue.1-2 , pp. 27
- Barna, P.B.¹ Adamik, M.²

46
- 0003840273
- McGraw-Hill, New York
- D.L. Smith, Thin-Film Deposition: Principle and Practice, McGraw-Hill, New York, 1995.
- (1995) Thin-Film Deposition: Principle and Practice
- Smith, D.L.¹

47
- 0002768734
- J.M. Nieuwenhuizen, H.B. Haanstra, Philips Tech. Rev. 27 (1966) 87.
- (1966) Philips Tech. Rev , vol.27 , pp. 87
- Nieuwenhuizen, J.M.¹ Haanstra, H.B.²

48
- 33846816540
- I. Iordanova, P.J. Kelly, R. Mirchev, V. Antonov, Vacuum 81/7 (2007) 830.
- (2007) Vacuum , vol.81 , Issue.7 , pp. 830
- Iordanova, I.¹ Kelly, P.J.² Mirchev, R.³ Antonov, V.⁴

49
- 0026120399
- J. Pelleg, L.Z. Zevin, S. Lungo, N. Croitoru, Thin Solid Films 197/1-2 (1991) 117.
- (1991) Thin Solid Films , vol.197 , Issue.1-2 , pp. 117
- Pelleg, J.¹ Zevin, L.Z.² Lungo, S.³ Croitoru, N.⁴

50
- 0029277295
- U.C. Oh, J.H. Je, J.Y. Lee, J. Mater. Res. 10/3 (1995) 634.
- (1995) J. Mater. Res , vol.10 , Issue.3 , pp. 634
- Oh, U.C.¹ Je, J.H.² Lee, J.Y.³

51
- 0006712597
- L. Hultman, J.E. Sundgren, J.E. Greene, J. Appl. Phys. 66/2 (1989) 536.
- (1989) J. Appl. Phys , vol.66 , Issue.2 , pp. 536
- Hultman, L.¹ Sundgren, J.E.² Greene, J.E.³

52
- 84957228669
- L. Hultman, W.D. Munz, J. Musil, S. Kadlec, I. Petrov, J.E. Greene, J. Vac. Sci. Technol., A 9/3 (1991) 434.
- (1991) J. Vac. Sci. Technol., A , vol.9 , Issue.3 , pp. 434
- Hultman, L.¹ Munz, W.D.² Musil, J.³ Kadlec, S.⁴ Petrov, I.⁵ Greene, J.E.⁶

53
- 0029405236
- G. Knuyt, C. Quaeyhaegens, J. D'Haen, L.M. Stals, Surf. Coat. Technol. 76-77/Part 1 (1995) 311.
- (1995) Surf. Coat. Technol , vol.76-77 , Issue.PART 1 , pp. 311
- Knuyt, G.¹ Quaeyhaegens, C.² D'Haen, J.³ Stals, L.M.⁴

54
- 0038650933
- D. Gall, S. Kodambaka, M.A. Wall, I. Petrov, J.E. Greene, J. Appl. Phys. 93/11 (2003) 9086.
- (2003) J. Appl. Phys , vol.93 , Issue.11 , pp. 9086
- Gall, D.¹ Kodambaka, S.² Wall, M.A.³ Petrov, I.⁴ Greene, J.E.⁵

55
- 0031556912
- J.P. Zhao, X. Wang, Z.Y. Chen, S.Q. Yang, T.S. Shi, X.H. Liu, J. Phys. D: Appl. Phys. 30/1 (1997) 5.
- (1997) J. Phys. D: Appl. Phys , vol.30 , Issue.1 , pp. 5
- Zhao, J.P.¹ Wang, X.² Chen, Z.Y.³ Yang, S.Q.⁴ Shi, T.S.⁵ Liu, X.H.⁶

56
- 0023346388
- V. Valvoda, J. Musil, Thin Solid Films 149/1 (1987) 49.
- (1987) Thin Solid Films , vol.149 , Issue.1 , pp. 49
- Valvoda, V.¹ Musil, J.²

57
- 19444375302
- S. Mahieu, P. Ghekiere, G. De Winter, R. De Gryse, D. Depla, O.I. Lebedev, Diffusion and Defect Data Pt.B: Solid State Phenomena, 2005, p. 447.
- (2005) Diffusion and Defect Data Pt.B: Solid State Phenomena , pp. 447
- Mahieu, S.¹ Ghekiere, P.² De Winter, G.³ De Gryse, R.⁴ Depla, D.⁵ Lebedev, O.I.⁶

58
- 33751222569
- A. Karimi, G. Allidi, R. Sanjines, Surf. Coat. Technol. 201/7 (2006) 4062.
- (2006) Surf. Coat. Technol , vol.201 , Issue.7 , pp. 4062
- Karimi, A.¹ Allidi, G.² Sanjines, R.³

59
- 24144489507
- F. Mei, N. Shao, L. Wei, Y. Dong, G. Li, Appl. Phys. Lett. 87/1 (2005) 011906.
- (2005) Appl. Phys. Lett , vol.87 , Issue.1 , pp. 011906
- Mei, F.¹ Shao, N.² Wei, L.³ Dong, Y.⁴ Li, G.⁵

60
- 0002173308
- L. Hultman, Vacuum 57/1 (2000) 1.
- (2000) Vacuum , vol.57 , Issue.1 , pp. 1
- Hultman, L.¹

61
- 31144457848
- M. Beckers, N. Schell, R.M.S. Martins, A. Mücklich,W. Möller, J. Vac. Sci. Technol., A 23/5 (2005) 1384.
- (2005) J. Vac. Sci. Technol., A , vol.23 , Issue.5 , pp. 1384
- Beckers, M.¹ Schell, N.² Martins, R.M.S.³ Mücklich, A.⁴ Möller, W.⁵

62
- 0037158658
- J.Y. Rauch, C. Rousselot, N. Martin, Surf. Coat. Technol. 157/2-3 (2002) 138.
- (2002) Surf. Coat. Technol , vol.157 , Issue.2-3 , pp. 138
- Rauch, J.Y.¹ Rousselot, C.² Martin, N.³

63
- 0003400638
- John Wiley & Sons, New York
- B. Chapman, Glow Discharge Processes - Sputtering and Plasma Etching, John Wiley & Sons, New York, 1980.
- (1980) Glow Discharge Processes - Sputtering and Plasma Etching
- Chapman, B.¹

64
- 0003602826
- Academic Press, London
- M. Ohring, The Materials Science of Thin Films, Academic Press, London, 1992.
- (1992) The Materials Science of Thin Films
- Ohring, M.¹

65
- 77649190679
- Springer, Berlin
- G. Franz, Oberflächentechnologie mit Niederdruckplasmen - Beschichten und Strukturieren in der Mikrotechnik, Springer, Berlin, 1998.
- (1998) Oberflächentechnologie mit Niederdruckplasmen - Beschichten und Strukturieren in der Mikrotechnik
- Franz, G.¹

66
- 0014465023
- P. Sigmund, Appl. Phys. Lett. 14/3 (1969) 114.
- (1969) Appl. Phys. Lett , vol.14 , Issue.3 , pp. 114
- Sigmund, P.¹

67
- 4344718259
- AVS, New York
- W.D. Westwood, Sputter Deposition, AVS, New York, 2003.
- (2003) Sputter Deposition
- Westwood, W.D.¹

68
- 0033509617
- A. Kimura, H. Hasegawa, K. Yamada, T. Suzuki, Surf. Coat. Technol. 120-121 (1999) 438.
- (1999) Surf. Coat. Technol , vol.120-121 , pp. 438
- Kimura, A.¹ Hasegawa, H.² Yamada, K.³ Suzuki, T.⁴

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