Crystallography of magnetron sputtered TiN coatings on steel substrates

Vacuum

Volumn 81, Issue 7, 2007, Pages 830-842

  Iordanova, I ^a   Kelly, P J ^b   Mirchev, R ^a   Antonov, V ^c  

^a UNIVERSITY OF SOFIA   (Bulgaria)

^b MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

^c INSTITUTE FOR NUCLEAR RESEARCH AND NUCLEAR ENERGY   (Bulgaria)

Author keywords

CFUBMS; Crystallographic texture; Phase composition; Residual elastic strain; Stored elastic energy; TiN films

Indexed keywords

COATING TECHNIQUES; CRYSTALLOGRAPHY; MAGNETRON SPUTTERING; STEEL; STOICHIOMETRY; X RAY DIFFRACTION ANALYSIS;

CFUBMS; CRYSTALLOGRAPHIC TEXTURES; RESIDUAL ELASTIC STRAIN; STORED ELASTIC ENERGY; TIN FILMS;

TITANIUM COMPOUNDS;

EID: 33846816540     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.09.018     Document Type: Article

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