Biaxially aligned yttria stabilized zirconia and titanium nitride layers deposited by unbalanced magnetron sputtering

Solid State Phenomena

Volumn 105, Issue , 2005, Pages 447-452

  Mahieu, Stijn ^a   Ghekiere, Pieter ^a   De Winter, Griet ^a   De Gryse, Roger ^a   Depla, Diederik ^a   Lebedev, Oleg I ^b  

^a GHENT UNIVERSITY   (Belgium)

^b UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Biaxial alignment; Magnetron sputtering; Microstructure; Preferential orientation; Thin film

Indexed keywords

MAGNETRON SPUTTERING; MICROSTRUCTURE; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; STAINLESS STEEL; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; YTTRIUM; ZIRCONIA;

BIAXIAL ALIGNMENT; PREFERENTIAL ORIENTATION; SELECTIVE AREA DIFFRACTION (SAD); YTTRIA STABILIZED ZIRCONIA (YSZ);

THIN FILMS;

EID: 19444375302     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.105.447     Document Type: Conference Paper

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