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Volumn 169-170, Issue , 2003, Pages 367-370
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Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films
a
KEIO UNIVERSITY
(Japan)
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Author keywords
Aluminum nitride; Anisotropy; Lattice parameters; Phase transitions
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Indexed keywords
ANISOTROPY;
CHROMIUM COMPOUNDS;
CRYSTAL STRUCTURE;
MICROSTRUCTURE;
SHRINKAGE;
SYNTHESIS (CHEMICAL);
TITANIUM COMPOUNDS;
ANISOTROPIC LATTICE EXPANSION;
METALLIC FILMS;
ANISOTROPIC MEDIUM;
COATING;
FILM;
SHRINKAGE;
SURFACE TREATMENT;
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EID: 0038469634
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(03)00040-9 Document Type: Article |
Times cited : (122)
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References (12)
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