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Journal of Raman Spectroscopy

Volumn 40, Issue 12, 2009, Pages 1849-1857

Measuring stresses in thin metal films by means of Raman microscopy using silicon as a strain gage material

(4) Wermelinger, Thomas a Charpentier, Christophe a Yüksek, Müge Deniz a Spolenak, Ralph a

a ETH ZURICH (Switzerland)

Author keywords

Grain growth; Raman microscopy; Silicon; Thermal stresses; Thin film

Indexed keywords

AMORPHOUS SILICON; ELECTROMECHANICAL DEVICES; FAILURE (MECHANICAL); FILM GROWTH; GRAIN GROWTH; MEMS; METALLIC FILMS; MICROELECTRONICS; STRAIN GAGES; THERMAL EXPANSION; THERMAL STRESS;

DELAMINATION CRACK; DEPOSITION PROCESS; HIGH STRESS; MECHANICAL STRESS; RAMAN MICROSCOPY; STRAIN-GAGES; STRESSMIGRATION; THERMAL EXPANSION COEFFICIENTS; THIN METAL FILMS; THIN-FILMS;

THIN FILMS;

EID: 72249118223 PISSN: 03770486 EISSN: 10974555 Source Type: Journal
DOI: 10.1002/jrs.2332 Document Type: Article

Times cited : (10)

References (50)

1
- 85153231637
- D. F. Bahr, B. T. Crozier, C. D. Richards, R. F. Richards, Mech. Prop. Str. Films 2001, 1413, 28.
- (2001) Mech. Prop. Str. Films , vol.1413 , pp. 28
- Bahr, D.F.¹ Crozier, B.T.² Richards, C.D.³ Richards, R.F.⁴

2
- 0000541904
- J. R. Lloyd, Semicond. Sci. Technol. 1997, 12, 1177.
- (1997) Semicond. Sci. Technol , vol.12 , pp. 1177
- Lloyd, J.R.¹

3
- 20444457907
- M. Pletea, W. Bruckner, H. Wendrock, R. Kaltofen,J.Appl.Phys.2005, 97,054908.
- (2005) J.Appl.Phys , vol.97 , pp. 054908
- Pletea, M.¹ Bruckner, W.² Wendrock, H.³ Kaltofen, R.⁴

4
- 0030081591
- I. De Wolf, Semicond. Sci. Technol. 1996, 11, 139.
- (1996) Semicond. Sci. Technol , vol.11 , pp. 139
- de Wolf, I.¹

5
- 36449005810
- I. De Wolf, J. Vanhellemont, A. Romanorodriguez, H. Norstrom, H. E. Maes, J. Appl. Phys. 1992, 71, 898.
- (1992) J. Appl. Phys , vol.71 , pp. 898
- de Wolf, I.¹ Vanhellemont, J.² Romanorodriguez, A.³ Norstrom, H.⁴ Maes, H.E.⁵

6
- 0142004209
- V. T. Srikar, A. K. Swan, M. S. Ü nlü, B. B. Goldberg, M. Spearing, J. Microelectromech. Syst. 2003, 12, 779.
- (2003) J. Microelectromech. Syst , vol.12 , pp. 779
- Srikar, V.T.¹ Swan, A.K.² ÜNlü, M.S.³ Goldberg, B.B.⁴ Spearing, M.⁵

7
- 0037424172
- R. Spolenak, W. L. Brown, N. Tamura, A. A. MacDowell, R. S. Celestre, H. A. Padmore, B. Valek, J. C. Bravman, T. Marieb, H. Fujimoto, B. W. Batterman, J. R. Patel, Phys. Rev. Lett. 2003, 90, 096102.
- (2003) Phys. Rev. Lett , vol.90 , pp. 096102
- Spolenak, R.¹ Brown, W.L.² Tamura, N.³ Macdowell, A.A.⁴ Celestre, R.S.⁵ Padmore, H.A.⁶ Valek, B.⁷ Bravman, J.C.⁸ Marieb, T.⁹ Fujimoto, H.¹⁰ Batterman, B.W.¹¹ Patel, J.R.¹²

8
- 2942517835
- M. A. Phillips, R. Spolenak, N. Tamura, W. L. Brown, A. A. MacDowell, R. S. Celestre, H. A. Padmore, B. W. Batterman, E. Arzt, J. R. Patel, Microelectron. Eng. 2004, 75, 117.
- (2004) Microelectron. Eng , vol.75 , pp. 117
- Phillips, M.A.¹ Spolenak, R.² Tamura, N.³ Brown, W.L.⁴ Macdowell, A.A.⁵ Celestre, R.S.⁶ Padmore, H.A.⁷ Batterman, B.W.⁸ Arzt, E.⁹ Patel, J.R.¹⁰

9
- 0032084084
- R. Spolenak, O. Kraft, E. Arzt, Microelectron. Reliab. 1998, 38, 1015.
- (1998) Microelectron. Reliab , vol.38 , pp. 1015
- Spolenak, R.¹ Kraft, O.² Arzt, E.³

10
- 0037366817
- N. Tamura, A. A. MacDowell, R. Spolenak, B. C. Valek, J. C. Bravman, W. L. Brown, R. S. Celestre, H. A. Padmore, B. W. Batterman, J. R. Patel, J. Synchrotron Radiat. 2003, 10, 137.
- (2003) J. Synchrotron Radiat , vol.10 , pp. 137
- Tamura, N.¹ Macdowell, A.A.² Spolenak, R.³ Valek, B.C.⁴ Bravman, J.C.⁵ Brown, W.L.⁶ Celestre, R.S.⁷ Padmore, H.A.⁸ Batterman, B.W.⁹ Patel, J.R.¹⁰

11
- 0037858030
- S. Kramer, J. Mayer,C. Witt,A. Weickenmeier, M. Ruhle, Ultramicroscopy 2000, 81, 245.
- (2000) Ultramicroscopy , vol.81 , pp. 245
- Kramer, S.¹ Mayer, J.² Witt, C.³ Weickenmeier, A.⁴ Ruhle, M.⁵

12
- 0242636927
- V. Senez, A. Armigliato, I. De Wolf, G. Carnevale, R. Balboni, S. Frabboni, A. Benedetti, J. Appl. Phys. 2003, 94, 5574
- (2003) J. Appl. Phys , vol.94 , pp. 5574
- Senez, V.¹ Armigliato, A.² de Wolf, I.³ Carnevale, G.⁴ Balboni, R.⁵ Frabboni, S.⁶ Benedetti, A.⁷

13
- 0742328847
- E. Anastassakis, E. Burstein J. Phys. Chem. Solids 1971, 32, 313.
- (1971) J Phys Chem. Solids , vol.32 , pp. 313
- Anastassakis, E.¹ Burstein, E.²

14
- 51549098260
- R. Ossikovski, Q. Nguyen, G. Picardi, J. Schreiber, P. Morin, J. Raman Spectrosc. 2008, 39, 661.
- (2008) J. Raman Spectrosc , vol.39 , pp. 661
- Ossikovski, R.¹ Nguyen, Q.² Picardi, G.³ Schreiber, J.⁴ Morin, P.⁵

15
- 85153289078
- E. Bonera, M. Fanciulli, D. N. Batchelder,J.Appl.Phys.2003,94,2729.
- (2003) J.Appl.Phys , vol.2729 , pp. 94
- Bonera, E.¹ Fanciulli, M.² Batchelder, D.N.³

16
- 0037463296
- B. Dietrich, V. Bukalo, A. Fischer, K. F. Dombrowski, E. Bugiel, B. Kuck, H. H. Richter, Appl. Phys. Lett. 2003, 82, 1176.
- (2003) Appl. Phys. Lett , vol.82 , pp. 1176
- Dietrich, B.¹ Bukalo, V.² Fischer, A.³ Dombrowski, K.F.⁴ Bugiel, E.⁵ Kuck, B.⁶ Richter, H.H.⁷

17
- 0000704120
- Q. Ma, S. Chiras, D. R. Clarke, Z. Suo, J. Appl. Phys. 1995, 78, 1614.
- (1995) J. Appl. Phys , vol.78 , pp. 1614
- Ma, Q.¹ Chiras, S.² Clarke, D.R.³ Suo, Z.⁴

18
- 56549108086
- K. Wasmer, T. Wermelinger, A. Bidiville, R. Spolenak, J. Michler, J. Mater. Res. 2008, 23, 3040.
- (2008) J. Mater. Res , vol.23 , pp. 3040
- Wasmer, K.¹ Wermelinger, T.² Bidiville, A.³ Spolenak, R.⁴ Michler, J.⁵

19
- 0001675228
- Z. Iqbal, S. Veprek, J. Phys. C-Solid State Phys. 1982, 15, 377.
- (1982) J. Phys. C-solid State Phys , vol.15 , pp. 377
- Iqbal, Z.¹ Veprek, S.²

20
- 0032594715
- Y. Gogotsi, C. Baek, F. Kirscht, Semicond. Sci. Technol. 1999, 14, 936.
- (1999) Semicond. Sci. Technol , vol.14 , pp. 936
- Gogotsi, Y.¹ Baek, C.² Kirscht, F.³

21
- 85153312533
- H. Tang I. P. Herman, Phys. Rev. B 1991, 43, 2299.
- (1991) Phys. Rev. B , vol.2299 , pp. 43
- Tang, I.H.¹ Herman, P.²

22
- 34447324899
- T. Wermelinger, C. Borgia, C. Solenthaler, R. Spolenak, Acta Mater. 2007,55,4657.
- (2007) Acta Mater , vol.55 , pp. 4657
- Wermelinger, T.¹ Borgia, C.² Solenthaler, C.³ Spolenak, R.⁴

23
- 85153295177
- FB Materials Science, Ceramics Group: TU Darmstadt
- S. L. Dos Santos e Lucato, Lince v. 231. 1998, FB Materials Science, Ceramics Group: TU Darmstadt.
- (1998) , vol.231
- Dos Santos Lucato, S.L.¹ Lince, V.²

24
- 0037416723
- L. Mariucci, A. Pecora, G. Fortunato, C. Spinella, C. Bongiorno, Thin Solid Films 2003, 427, 91.
- (2003) Thin Solid Films , vol.427 , pp. 91
- Mariucci, L.¹ Pecora, A.² Fortunato, G.³ Spinella, C.⁴ Bongiorno, C.⁵

25
- 36449004108
- J. S. Im, H. J. Kim, M. O. Thompson, Appl. Phys. Lett. 1993, 63, 1969.
- (1993) Appl. Phys. Lett , vol.63 , pp. 1969
- Im, J.S.¹ Kim, H.J.² Thompson, M.O.³

26
- 0028481824
- Part 1 - Regular Papers Short Notes & Review Papers
- H. Watanabe, H. Miki, S. Sugai, K. Kawasaki, T. Kioka, Japanese J.Appl. Phys. Part 1 - Regular Papers Short Notes & Review Papers 1994, 33, 4491.
- (1994) Japanese J.appl. Phys , vol.33 , pp. 4491
- Watanabe, H.¹ Miki, H.² Sugai, S.³ Kawasaki, K.⁴ Kioka, T.⁵

27
- 0000131613
- T. Sameshima, K. Saitoh, M. Sato, A. Tajima, N. Takashima, Japanese J. Appl. Phys. Part 2 - Letters 1997, 36, L1360.
- (1997) Appl. Phys. Part 2 - Letters , vol.36
- Sameshima, T.¹ Saitoh, K.² Sato, M.³ Tajima, A.⁴ Takashima, N.⁵ Japanese, J.⁶

28
- 0001142560
- M. Miyasaka J. Stoemenos, J. Appl. Phys. 1999, 86, 5556.
- (1999) J. Appl. Phys , vol.86 , pp. 5556
- Miyasaka, M.¹ Stoemenos, J.²

29
- 0028207696
- D. H. Choi, E. Sadayuki, O. Sugiura, M. Matsumura, Japanese J. Appl. Phys. Part 1 - Regular Papers Short Notes & Review Papers 1994, 33, 70.
- (1994) Appl. Phys. Part 1 - Regular Papers Short Notes & Review Papers , vol.33 , pp. 70
- Choi, D.H.¹ Sadayuki, E.² Sugiura, O.³ Matsumura, M.⁴ Japanese, J.⁵

30
- 0026976681
- D. H. Choi, K. Shimizu, O. Sugiura, M. Matsumura, Japanese J. Appl. Phys. Part 1 - Regular Papers Short Notes & Review Papers 1992, 31, 4545.
- (1992) Appl. Phys. Part 1 - Regular Papers Short Notes & Review Papers , vol.31 , pp. 4545
- Choi, D.H.¹ Shimizu, K.² Sugiura, O.³ Matsumura, M.⁴ Japanese, J.⁵

31
- 36149016256
- H. R. Philipp, E. A. Taft, Phys. Rev. 1960, 120, 37.
- (1960) Phys. Rev , vol.120 , pp. 37
- Philipp, H.R.¹ Taft, E.A.²

32
- 85153022229
- J. Menendez, M. Cardona, Phys. Rev. B 1984, 29, 2051.
- Phys. Rev. B , vol.1984 , pp. 29
- Menendez, J.¹ Cardona, M.²

33
- 0000870888
- R. Tsu, J. G. Hernandez, Appl. Phys. Lett. 1982, 41, 1016.
- (1982) Appl. Phys. Lett , vol.41 , pp. 1016
- Tsu, R.¹ Hernandez, J.G.²

34
- 0014700507
- E. Anastassakis, A. Pinczuk, E. Burstein, F. H. Pollak, M. Cardona,Solid State Commun. 1970, 8, 133.
- (1970) Solid State Commun , vol.8 , pp. 133
- Anastassakis, E.¹ Pinczuk, A.² Burstein, E.³ Pollak, F.H.⁴ Cardona, M.⁵

35
- 0037416579
- K. Brendel, N. H. Nickel, P. Lengsfeld, A. Schopke, I. Sieber, M. Nerding, H. P. Strunk, W. Fuhs, Thin Solid Films 2003, 427, 86.
- (2003) Thin Solid Films , vol.427 , pp. 86
- Brendel, K.¹ Nickel, N.H.² Lengsfeld, P.³ Schopke, A.⁴ Sieber, I.⁵ Nerding, M.⁶ Strunk, H.P.⁷ Fuhs, W.⁸

36
- 0036536777
- M. Nerding, R. Dassow, S. Christiansen, J. R. Kohler, J. Krinke, J. H. Werner, H. P. Strunk, J. Appl. Phys. 2002, 91, 4125.
- (2002) J. Appl. Phys , vol.91 , pp. 4125
- Nerding, M.¹ Dassow, R.² Christiansen, S.³ Kohler, J.R.⁴ Krinke, J.⁵ Werner, J.H.⁶ Strunk, H.P.⁷

37
- 0035873481
- S. Christiansen, P. Lengsfeld, J. Krinke, M. Nerding, N. H. Nickel, H. P. Strunk, J. Appl. Phys. 2001, 89, 5348.
- (2001) J. Appl. Phys , vol.89 , pp. 5348
- Christiansen, S.¹ Lengsfeld, P.² Krinke, J.³ Nerding, M.⁴ Nickel, N.H.⁵ Strunk, H.P.⁶

38
- 85153238741
- S. Loreti, M. Vittori, L. Mariucci, G. Fortunato, Solid StatePhenomena 1999,67-8, 181.
- (1999) G. Fortunato, Solid Statephenomena , vol.181 , pp. 67-68
- Loreti, S.¹ Vittori, M.² Mariucci, L.³

39
- 36048979054
- V. L. Borblik, J. Phys. - Condensed Matter 2007, 19, 456219.
- (2007) J. Phys. - Condensed Matter , vol.19 , pp. 456219
- Borblik, V.L.¹

40
- 0000130088
- M. Chandrasekhar, J. B. Renucci, M. Cardona, Phys. Rev. B 1978, 17, 1623.
- (1978) Phys. Rev. B , vol.17 , pp. 1623
- Chandrasekhar, M.¹ Renucci, J.B.² Cardona, M.³

41
- 0000574313
- A. Ballantyne, H. Hyman, C. L. Dym, R. Southworth, J. Appl. Phys. 1985,58,4717.
- (1985) J. Appl. Phys , vol.58 , pp. 4717
- Ballantyne, A.¹ Hyman, H.² Dym, C.L.³ Southworth, R.⁴

42
- 0040636505
- M. Mondol, H. Y. Li, G. Owen, H. I. Smith, J. Vac. Sci. Technol., B 1994, 12,4024.
- (1994) Sci. Technol., B , vol.12 , pp. 4024
- Mondol, M.¹ Li, H.Y.² Owen, G.³ Smith, H.I.⁴ Vac, J.⁵

43
- 0036954991
- C. S. Montross, H. Yokokawa, M. Dokiya, Br.Ceram.Trans. 2002, 101, 85.
- (2002) Br.ceram.trans , vol.101 , pp. 85
- Montross, C.S.¹ Yokokawa, H.² Dokiya, M.³

44
- 0041725766
- Y. Guyot, C. Malhaire, M. LeBerre, B. Champagnon, A. Sibai, E. Bustarret, D. Barbier, Mater. Sci. Eng., B - Solid State Materials for Advanced Technology 1997, 46, 24.
- (1997) Mater. Sci. Eng., B - Solid State Materials For Advanced Technology , vol.46 , pp. 24
- Guyot, Y.¹ Malhaire, C.² Leberre, M.³ Champagnon, B.⁴ Sibai, A.⁵ Bustarret, E.⁶ Barbier, D.⁷

45
- 0032674793
- J. H. Chae, J. Y. Lee, S. W. Kang, Sens. Actuators, A - Physical 1999, 75,222.
- (1999) Sens. Actuators, a - Physical , vol.75 , pp. 222
- Chae, J.H.¹ Lee, J.Y.² Kang, S.W.³

46
- 0005653216
- F. C. Nix, D. MacNair, Phys. Rev. 1941, 60, 597.
- (1941) Phys. Rev , vol.60 , pp. 597
- Nix, F.C.¹ Macnair, D.²

47
- 85153183094
- A. K. Sinha, H. J. Levinstein, T. E. Smith, J. Appl. Phys. 1978, 49, 2423.
- (1978) J. Appl. Phys , vol.2423 , pp. 49
- Sinha, A.K.¹ Levinstein, H.J.² Smith, T.E.³

48
- 85153279877
- M. A. Elkhakani, M. Chaker, J. Vac. Sci. Technol., B 1993, 11, 2930.
- (1993) Sci. Technol., B , vol.2930 , pp. 11
- Elkhakani, M.A.¹ Chaker, M.² Vac, J.³

49
- 33645225329
- S. J. Hwang, Y. D. Lee, Y. B. Park, J. H. Lee, C. O. Jeong, Y. C. Joo, Scr. Mater. 2006, 54, 1841.
- (2006) Scr. Mater , vol.54 , pp. 1841
- Hwang, S.J.¹ Lee, Y.D.² Park, Y.B.³ Lee, J.H.⁴ Jeong, C.O.⁵ Joo, Y.C.⁶

50
- 0000519955
- D. S. Gardner, P. A. Flinn, J.Appl. Phys. 1990, 67, 1831.
- (1990) J.appl. Phys , vol.67 , pp. 1831
- Gardner, D.S.¹ Flinn, P.A.²

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