Microstructure of laser-crystallized silicon thin films on glass substrate

Journal of Applied Physics

Volumn 91, Issue 7, 2002, Pages 4125-4130

  Nerding, M ^a   Dassow, R ^b   Christiansen, S ^a   Kohler J R ^b   Krinke, J ^a   Werner, J H ^b   Strunk, H P ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON LAYERS; AVERAGE WIDTH; BOUNDARY POPULATION; CRYSTALLIZATION PARAMETER; ELECTRON BACKSCATTERING DIFFRACTION; GLASS SUBSTRATES; GRAIN ORIENTATION; GRAIN SIZE; LASER CRYSTALLIZATION; ORIENTATION DISTRIBUTIONS; POLY-SI FILMS; POLYCRYSTALLINE SILICON FILMS; REPETITION RATE; SECOND ORDERS; SILICON ON GLASS; SILICON THIN FILM; TWIN BOUNDARIES;

AMORPHOUS SILICON; GRAIN BOUNDARIES; MICROSTRUCTURE; POLYCRYSTALLINE MATERIALS; POLYSILICON; TRANSMISSION ELECTRON MICROSCOPY;

SUBSTRATES;

EID: 0036536777     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1454189     Document Type: Article

References (31)

1. T. Sameshima, M. Hara, and S. Usui, Jpn. J. Appl. Phys., Part 1 28, 1789 (1989). jjb JAPNDE 0021-4922
2. R. B. Bergmann, J. Köhler, R. Dassow, C. Zaczek, and J. H. Werner, Phys. Status Solidi A 166, 587 (1993). psa PSSABA 0031-8965
3. J. S. Im, M. A. Crowder, R. S. Sposili, J. P. Leonard, H. J. Kim, J. H. Yoon, V. V. Gupta, H. Jin Song, and H. S. Cho, Phys. Status Solidi A 166, 603 (1998). psa PSSABA 0031-8965
4. J. R. Köhler, R. Dassow, R. B. Bergmann, J. Krinke, H. P. Strunk, and J. H. Werner, Thin Solid Films 337, 129 (1999). tsf THSFAP 0040-6090
5. G. Aichmayr, D. Toet, M. Mulato, P. V. Santos, A. Spangenberg, S. Christiansen, M. Albrecht, and H. P. Strunk, J. Appl. Phys. 85, 4010 (1999). jap JAPIAU 0021-8979
6. G. Andrä, J. Bergmann, F. Falk, E. Ose, and H. Stafast, Phys. Status Solidi A 166, 629 (1998). psa PSSABA 0031-8965
7. J. Platen, B. Selle, S. Christiansen, M. Nerding, M. Schmidbauer, and W. Fuhs, Mater. Res. Soc. Symp. Proc. 609, A8.61 (2000); mrs MRSPDH 0272-9172
8. L. Oberbeck, T. A. Wagner, and R. B. Bergmann, 609, A7.1 (2000); mrs MRSPDH 0272-9172
9. T. A. Wagner, L. Oberbeck, M. Nerding, H. P. Strunk, and R. B. Bergmann, 664, A22.3.1 (2001). mrs MRSPDH 0272-9172
10. H. A. Atwater, C. V. Thompson, and H. I. Smith, J. Mater. Res. 3, 1232 (1988). jmr JMREEE 0884-2914
11. S. Christiansen, P. Lengsfeld, J. Krinke, M. Nerding, N. H. Nickel, and H. P. Strunk, J. Appl. Phys. 89, 5348 (2001). jap JAPIAU 0021-8979
12. H. Kuriyama, T. Nohuda, Y. Aya, T. Kuwahara, K. Wakisaka, S. Kiyama, and S. Tsuda, Jpn. J. Appl. Phys., Part 1 33, 5657 (1994). jjb JAPNDE 0021-4922
13. J. Krinke, M. Albrecht, W. Dorsch, A. Voigt, and H. P. Strunk, 25th IEEE PV Special Conference (IEEE, New York, 1996), p. 473;
14. A. Bary, B. Thercey, G. Poullain, J. L. Chermant, and G. Nouet, Rev. Phys. Appl. 22, 597 (1987); rpa RPHAAN 0035-1687
15. A. Rocher, C. Fontaine, and C. Dianteill, Inst. Phys. Conf. Ser. 60, 289 (1981); ipc IPHSAC 0305-2346
16. J. H. Werner, in Structure and Properties of Dislocations in Semiconductors, edited by S. G. Roberts (Institute of Physics, Bristol, 1989), Vol. 104, pp. 63;
17. J. H. Werner and N. E. Christensen, Polycrystalline Semiconductors II, edited by J. H. Werner and H. P. Strunk (Springer-Verlag, Berlin, 1991), Vol. 54, p. 145.
18. R. S. Sposili and J. S. Im, Appl. Phys. Lett. 70, 767 (1997). apl APPLAB 0003-6951
19. R. S. Sposili and J. S. Im, Appl. Phys. A: Mater. Sci. Process. A67, 273 (1998). mfc APAMFC 0947-8396
20. R. Dassow, J. R. Köhler, M. Nerding, H. P. Strunk, Y. Helen, K. Mourgues, O. Bonnaud, T. Mohammed-Brahim, and J. Werner, Mater. Res. Soc. Symp. Proc. 621, Q9.3 (2000). mrs MRSPDH 0272-9172
21. D. Hull and D. J. Bacon, Introduction to Dislocations, Series on Materials Science and Technology Vol. 37 (Pergamon, Oxford, 1984).
22. W. Bollmann, Crystal Defects and Crystalline Interfaces (Springer-Verlag, Berlin, 1970).
23. K. Löhberg, Z. Metallkd. 63, 1 (1972); zem ZEMTAE 0044-3093
24. F. Vollertsen and S. Vogler, Werkstoffeigenschaften und Mikrostruktur (Hanser Verlag, München, 1989).
25. T. J. Whalen and A. T. Anderson, J. Am. Ceram. Soc. 58, 396 (1975). jac JACTAW 0002-7820
26. K. A. Jackson and B. Chalmers, Can. J. Phys. 34, 473 (1956). cjp CJPHAD 0008-4204
27. K. A. Jackson, in Surface Modification and Alloying by Laser, Ion and Electron Beams, edited by J. M. Poate, G. Foti, and D. C. Jacobsen, Nato Conference Series (Plenum Press, New York, 1981).
28. J. L. Batstone, Philos. Mag. A 67, 51 (1993). pma PMAADG 0141-8610
29. M. Nerding, S. Christiansen, S. Vogler, G. Andrae, F. Falk, and H. P. Strunk, in Solid State Phenomena, Vol. 80-81, edited by O. Bonnaud, T. Mohammed-Brahim, H. P. Strunk, and J. H. Werner (Scitec, Uetikon-Zuerich, 2001), p. 187.
30. M. A. Crowder, A. B. Limanov, and J. S. Im, Mater. Res. Soc. Symp. Proc. 621, Q9.6 (2000). mrs MRSPDH 0272-9172
31. R. Becker and W. Döring, Ann. Phys. (Leipzig) 24, 719 (1935). any ANPYA2 0003-3804