Analysis of local strain in aluminium interconnects by energy filtered CBED

Ultramicroscopy

Volumn 81, Issue 3-4, 2000, Pages 245-262

  Kramer S ^a   Mayer, J ^a   Witt, C ^a   Weickenmeier, A ^a   Ruhle M ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

CBED; Data processing image processing; Electromigration; Energy filtered imaging and diffraction; Finite element modelling

Indexed keywords

ALGORITHMS; ALUMINUM; CHEMICAL ANALYSIS; COMPUTER SIMULATION; ELECTROMIGRATION; ELECTRON BEAMS; FINITE ELEMENT METHOD; HOUGH TRANSFORMS; IMAGE PROCESSING; OPTICAL FILTERS; STRAIN; THERMAL EXPANSION;

ENERGY FILTERED CONVERGENT BEAM ELECTRON DIFFRACTION; HIGHER ORDER LAUE ZONE; LOCAL STRAIN;

ELECTRON DIFFRACTION;

ALUMINUM;

ACCURACY; ALGORITHM; ARTICLE; ELECTRON BEAM; ELECTRON DIFFRACTION; FILTER; IMAGING; INFORMATION PROCESSING; INSTRUMENT; TECHNIQUE;

EID: 0037858030     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00191-6     Document Type: Article

References (23)

1. Spence J.C.H., Zuo J.M. Electron Microdiffraction. 1992;Plenum Press, New York.
2. Zuo J.M. Ultramicroscopy. 41:1991;211-223.
3. Rozeveld S.J., Howe J.M., Schmauder S. Acta Metall. Mater. 40:1992;S173-S193.
4. Maier H.J., Renner H., Mughrabi H. Ultramicroscopy. 51:1993;136-145.
5. Wittmann R., Parzinger C., Gerthsen D. Ultramicroscopy. 70:1997;145-159.
6. Mukherji D., Wahi R.P. Scripta Materialia. 36:1997;1233-1238.
7. Qiu Y.Y. J. Alloys Compounds. 234:1996;157-166.
8. Saito M., Aoyama T., Nakata K., Suzuki T. Jap. J. Appl. Phys. 34:1995;350-354.
9. Rose H., Krahl D. Reimer in L. Energy Filtering Transmission Electron Microscopy. 1995;Springer, Berlin.
10. Pike W.T. Ultramicroscopy. 51:1993;136-145.
11. Deininger C., Necker G., Mayer J. Ultramicroscopy. 54:1994;15-30.
12. Streiffer S.K., Bader S., Deininger C., Mayer J., Rühle M. Mat. Res. Soc. Symp. Proc. 343:1994;615-620.
13. Hough, P.V.C, US Patent 3,069,654, 1962.
14. Krieger Lassen N.C. PhD Thesis, IMM-PHD-1994-3. 1994;Lyngby, Denmark.
15. Schwarzer R.A. Micron. 28:1997;249-265.
16. Krämer S., Mayer J. J. Microscopy. 194:1999;2-11.
17. Witt C., Volkert C.A. Mat. Res. Soc. Symp. Proc. 516:1998;33-43.
18. Deans S.R. IEEE Trans. Pattern. Anal., Machine Intell. 3:1981;185-188.
19. Zuo J.M., Spence J.C.H. Ultramicroscopy. 35:1991;185-196.
20. Bithell E.G., Stobbs W.M. J. Microscopy. 153:1989;39-49.
21. Lin Y.P., Bird D.M., Vincent R. Ultramicroscopy. 27:1989;233-240.
22. Mansfield J., Bird D., Saunders M. Ultramicroscopy. 48:1993;1-11.
23. Press W.H., Flannery B.P., Teukolky S.A., Vetterling W.T. Numerical Recipes. 1989;Cambridge University Press, Cambridge.