Crystallization mechanisms in laser irradiated thin amorphous silicon films

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 91-95

  Mariucci, L ^a   Pecora, A ^a   Fortunato, G ^a   Spinella, C ^a   Bongiorno, C ^a  

^a CNR   (Italy)

Author keywords

Crystallization; Excimer laser; Polycrystalline silicon

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; EXCIMER LASERS; GRAIN SIZE AND SHAPE; LASER BEAM EFFECTS; POLYSILICON;

ENERGY DENSITY;

THIN FILMS;

EID: 0037416723     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01254-3     Document Type: Conference Paper

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