Measurement of thermal expansion coefficient of poly-Si using microgauge sensors

Sensors and Actuators, A: Physical

Volumn 75, Issue 3, 1999, Pages 222-229

  Chae, Jung Hun ^a   Lee, Jae Youl ^a   Kang, Sang Won ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CURRENT MEASUREMENT; MICROELECTROMECHANICAL DEVICES; POLYCRYSTALLINE MATERIALS; SENSORS; THERMAL EXPANSION; THERMOANALYSIS; THIN FILMS; VOLTAGE MEASUREMENT;

MICROGAUGE SENSORS; POLYSILICON; THERMAL EXPANSION COEFFICIENT;

SILICON;

EID: 0032674793     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00279-9     Document Type: Article

References (8)

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